Multi Sensor CRTS-M6
ULVAC
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The rotary type multi-sensor "CRTS-M6" has been developed for the crystal oscillation type deposition controller "CRTM Series" .The 5MHz or 6MHz crystal is 6 pieces-mountable in the rotary type crystal holder.It can be used in such as a high rate vapor deposition and continuous multi-layer vapor deposition with safe.
Features
- Either 5 or 6 MHz 6 pieces of AT cut crystals are mountable.
- High reliability has been achieved with an original drive system that adopts the vacuum motor.
- The replacement of crystal is detachable together with the crystal holder.
- In case of the crystal failed (abnormal oscillation) is detected, it is automatically switched to next crystal by the signal from the controller(CRTM).
- The sensor head is small(50mm diameter), it is possible to install it in the evaporation deposition equipment flexibly.
Applications
- High rate,multi-layer deposition control for Optical,OrganicEL,Electric devices.
Specifications
| Sensor head | |
| Equipped crystal number | 6 pieces |
| Capacity of crystal | 4MHz, 5MHz or 6MHz(Selectable) AT cut crystal |
| Heat resistance temperature | 350C° |
| Cooling water volume | 1L / min |
| Weight | 1kg |
| Dimension | Φ50mm x H 約89mm |
| Controller | |
| Digital input | INIT, CNT, STOP |
| Digital output | Sensor No., BUSY, ERROR, RETRY, END |
| Utility | DC24V, 3.0A |
| Dimension W×D×H | 100mm x 252mm x 99mm |
