Multi Sensor

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The multi-sensor of the CRTS series of crystal deposition controller sensors can be equipped with multiple crystals, significantly reducing maintenance time. A highly reliable vacuum stepping motor is used to switch between crystals, enabling highly accurate switching. Multi-sensors are used in organic deposition and optical deposition, allowing automatic switching during continuous deposition. This improves the efficiency and accuracy of the deposition process and supports stable production.

Multi Sensor
CRTS-M6
The rotary type multi-sensor "CRTS-M6" has been developed for the crystal oscillation type deposition controller "CRTM Series" .The 5MHz or 6MHz crystal is 6 pieces-mountable in the rotary type crystal holder.It can be used in such as a high rate vapor deposition and continuous multi-layer vapor deposition with safe.

Multi Sensor
CRTS-12NS
The rotary type multi-sensor "CRTS-12NS" has been developed for the crystal oscillation type deposition controller "CRTM Series".The 5MHz crystal is 12 pieces-mountable in the rotary type crystal holder. It can be used in such as a high rate vapor deposition and continuous multi-layer vapor deposition with safe.