Quartz Crystal
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The UCR series crystals are ideal for accurate film thickness measurement because they minimize the effects of heat sources such as evaporation sources and have little individual variation. For organic materials, we use a 4MHz crystal manufactured with our own patented technology to support low-rate control. This enables precise film formation processes and contributes to quality improvement.
Quartz Crystal
UCR-4MAG-12
Crystal quartz plate・UCR Series for sensors for crystal oscillation type deposition controller of ULVAC.
The 4MHz frequency specification was added to the product lineup for the first time in the world, and it has excellent temperature characteristics and can be used for organic material films.
Quartz Crystal
UCR-5MAU-12
Crystal quartz plate・UCR Series for sensors for crystal oscillation type deposition controller of ULVAC.
Quartz Crystal
UCR-5MAG-12
Crystal quartz plate・UCR Series for sensors for crystal oscillation type deposition controller of ULVAC.
Quartz Crystal
UCR-6MAU-12
Crystal quartz plate・UCR Series for sensors for crystal oscillation type deposition controller of ULVAC.