Electron Beam Source
EB source for metal_EGL series
For more information on ULVAC products, purchase, and/or consideration, click here.
Versatile Electron Gun for Metal Film Production with a Proven Track Record
EB source for metal_EGL series
Model:EGL
The "Model:EGL" of electron beam evaporation sources are the result of ULVAC's many years of technology accumulation and track record to improve performance and reliability. The "Model:EGL" has a lineup of various types of guns, and can be used for arbitrary multilayer film deposition, high-speed deposition of thick films, and experiments in ultra-high vacuum.