Flat Top_EB source for metal_EGN series|Electron Beam Source|Vacuum-deposition electron beam source|Products|ULVAC SHOWCASE

Electron Beam Source
Flat Top_EB source for metal_EGN series

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Flat-Top Electron Gun with an Advanced Secondary Electron Absorption Mechanism

Flat Top_EB source for metal_EGN series

Model:EGN

The "Model:EGN" is a metal vapor deposition electron beam evaporation source newly developed with a focus on improving maintainability.
The use of a flat-top structure reduces the area of adhesion to the electron beam evaporation source, achieving high maintainability.

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