Power supply for EB source
Power supply for EB source_HPS series
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Power Supply for Electron Guns Supporting a Wide Range of Deposition Processes
Power supply for EB source_HPS series
Model:HPS
Based on ULVAC's many years of technology accumulation and achievements, this power supply is compatible with electron beam evaporation sources that stabilizes circuits and improves performance.
When used in combination with the EGC-10GS EB gun controller, it can be used for both optical thin film EB guns and metal thin film EB guns.