Desorption Gas Analyzer

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A process gas monitor is a device designed to measure and monitor the concentration and management of process gases in various manufacturing processes with high precision in real-time. Utilizing the quadrupole principle, it detects gas components and provides accurate gas composition data. This enables quality improvement and enhanced production efficiency in fields such as electronic devices and semiconductors, where strict gas control is essential.

Temperature-Programmed Desorption Gas Analyzer

TDS-M202R

Reach a target temperature for a short time, Mass analysis of up to 200amu is available
This system can measure the gas desorbed from a sample with a quadro-pole mass filter after heating up to a target temperature.

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Gas Transmission Rate Measurement System GTms-1

GTms-1 Series

Measure the absolute amount of gas transmission rate with a high sensitivity
With Standard Conductance Unit developed by AIST(National Institute of Advanced Industrial Science and Technology), this system can measure the absolute amount of transmission rate with a high sensitivity.

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