Automatic Type
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Automatic stage model that is compatible with 150mm/200mm/300mm substrates. Automatic mapping measurement allows for a color map display of film thickness distribution.
Automatic Type
Model:UNECS-1500A
"Model:UNECS" is a kind of spectroscopic ellipsometers to measure the refractive index and thickness of the thin film quickly and accurately. It adopts an unique measurement method, and realizes the compact size and high-speed measurement .
3 models are available for Φ150, 200 and 300mm samples. Auto mapping R-θ stage and auto focus function make it possible to measure film thickness of entire sample surface and dispay film thickness distribution by color map.
Automatic Type
Model:UNECS-2000A
"Model:UNECS" is a kind of spectroscopic ellipsometers to measure the refractive index and thickness of the thin film quickly and accurately. It adopts an unique measurement method, and realizes the compact size and high-speed measurement .
3 models are available for Φ150, 200 and 300mm samples. Auto mapping R-θ stage and auto focus function make it possible to measure film thickness of entire sample surface and dispay film thickness distribution by color map.
Automatic Type
Model:UNECS-3000A
"Model:UNECS" is a kind of spectroscopic ellipsometers to measure the refractive index and thickness of the thin film quickly and accurately. It adopts an unique measurement method, and realizes the compact size and high-speed measurement .
3 models are available for Φ150, 200 and 300mm samples. Auto mapping R-θ stage and auto focus function make it possible to measure film thickness of entire sample surface and dispay film thickness distribution by color map.