Introduction of vacuum equipments manufactured by ULVAC Group.
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A vacuum pump is a machine that exhausts gas from a sealed space and creates a pressure state (vacuum) lower than atmospheric pressure. There are many types of vacuum pumps, depending on the exhaust mechanism and exhaust speed, and they must be used according to the purpose and application.
A range of 1x10-2Pa to 1x10-6Pa is called high vacuum, a range of 1x10-7Pa to 1x10-9Pa is called ultra-high vacuum, and 1x10-10Pa or less is called extremely high vacuum.
Pump Type
Cryo Pump
A cryopump is a cryogenic vacuum pump designed to achieve conditions ranging from high vacuum to ultra-high vacuum. This pump efficiently captures gases by condensing and adsorbing them onto an internally installed cryogenic surface. One of the most significant features of the cryopump is its ability to provide a clean vacuum environment free from oil contamination.
Moreover, despite utilizing an adsorption method, the cryopump is noted for its exceptionally fast pumping speed compared to other vacuum pumps. This makes cryopumps widely used across various industries and research fields that require a clean and efficient vacuum environment.
When considering the implementation of a cryopump, its high performance and ability to maintain a clean vacuum environment are major advantages.
Cryo Pump
CRYO-U4H
CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Cryo Pump
CRYO-U6H
CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Cryo Pump
CRYO-U8H
CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Cryo Pump
CRYO-U8H-U
CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Cryo Pump
CRYO-U8HL
CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Cryo Pump
CRYO-U8HSP
CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Cryo Pump
CRYO-U10HSP
CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Cryo Pump
CRYO-U12H
CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Cryo Pump
CRYO-U12HL
CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Cryo Pump
CRYO-U12HSP
CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Cryo Pump
CRYO-U16
CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Cryo Pump
CRYO-U16P
CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Cryo Pump
CRYO-U20P
CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Cryo Pump
CRYO-U20H
CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Cryo Pump
CRYO-U22P
CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Cryo Pump
CRYO-U22WB
CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Cryo Pump
CRYO-U22H
CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Cryo Pump
CRYO-U30H
CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Cryo Pump
C10
This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.
Cryo Pump
C10AT
This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.
Cryo Pump
C15R
This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.
Cryo Pump
C30VR
This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.
Cryo Pump
C30VRT
This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.
Cryo Pump
C30MVR
This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.
Cryo Pump
C30MVRT
This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.
Cryo Pump
C30PVRT
This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.
Cryo Pump
C30PMVRT
This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.
Cryo Pump
C40R
This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.
Cryo Pump
PR1A
This product is a Dry N2 gas purge unit for regeneration.
It certainly shortens the time of temperature rise.
Cryo Pump
PR2A
This product is a Dry N2 gas purge unit for regeneration.
It certainly shortens the time of temperature rise.
Cryo Pump
PR3A
This product is a Dry N2 gas purge unit for regeneration.
It certainly shortens the time of temperature rise.
Cryo Pump
RBH-6
This product is easy to install and can shorten the time of regeneration certainly.
It promotes the evaporation of the moisture that is exhausted and helps to shorten the time of temperature rise and roughing time when the cryopump regenerates.
Cryo Pump
RBH-8
This product is easy to install and can shorten the time of regeneration certainly.
It promotes the evaporation of the moisture that is exhausted and helps to shorten the time of temperature rise and roughing time when the cryopump regenerates.
Cryo Pump
RBH-8HSP
This product is easy to install and can shorten the time of regeneration certainly.
It promotes the evaporation of the moisture that is exhausted and helps to shorten the time of temperature rise and roughing time when the cryopump regenerates.
Cryo Pump
RBH-10
This product is easy to install and can shorten the time of regeneration certainly.
It promotes the evaporation of the moisture that is exhausted and helps to shorten the time of temperature rise and roughing time when the cryopump regenerates.
Cryo Pump
RBH-12
This product is easy to install and can shorten the time of regeneration certainly.
It promotes the evaporation of the moisture that is exhausted and helps to shorten the time of temperature rise and roughing time when the cryopump regenerates.
Cryo Pump
RBH-16
This product is easy to install and can shorten the time of regeneration certainly.
It promotes the evaporation of the moisture that is exhausted and helps to shorten the time of temperature rise and roughing time when the cryopump regenerates.
Cryo Pump
RBH-20
This product is easy to install and can shorten the time of regeneration certainly.
It promotes the evaporation of the moisture that is exhausted and helps to shorten the time of temperature rise and roughing time when the cryopump regenerates.
Cryo Pump
RBH-22P
This product is easy to install and can shorten the time of regeneration certainly.
It promotes the evaporation of the moisture that is exhausted and helps to shorten the time of temperature rise and roughing time when the cryopump regenerates.
Cryo Pump
RBH-22
This product is easy to install and can shorten the time of regeneration certainly.
It promotes the evaporation of the moisture that is exhausted and helps to shorten the time of temperature rise and roughing time when the cryopump regenerates.
Cryo Pump
RBH-30
This product is easy to install and can shorten the time of regeneration certainly.
It promotes the evaporation of the moisture that is exhausted and helps to shorten the time of temperature rise and roughing time when the cryopump regenerates.
Cryo Pump
MBD-S
This product is a temperature display of cryopumps.
It is connected to the cryo-thermocouple thermometer MBS-C and displays the temperature of the cryopump digitally.
Cryo Pump
MBD-T
This product is a temperature display of cryopumps.
It is connected to the cryo-thermocouple thermometer MBS-C and displays the temperature of the cryopump digitally.
Super Trap
The Super Trap utilizes a compact helium refrigerator, ensuring there are no concerns about environmental damage. This device can cool to temperatures below 80K and is suitable for a wide range of applications, from low vacuum to ultra-high vacuum. Due to these characteristics, the Super Trap is used to enhance the exhaust performance of turbo molecular pumps, as a trap for diffusion pumps, and even as a vacuum pump dedicated to water vapor exhaust.
When considering the implementation of a Super Trap, its environmentally friendly design and wide range of applicability are significant advantages.
Super Trap
CRYO-T4
CRYO-T series is a pump that uses a one-stage type GM cryocooler. It is capable of high vacuum pumping ing to pump the moisture.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Super Trap
CRYO-T6
CRYO-T series is a pump that uses a one-stage type GM cryocooler. It is capable of high vacuum pumping ing to pump the moisture.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Super Trap
CRYO-T8
CRYO-T series is a pump that uses a one-stage type GM cryocooler. It is capable of high vacuum pumping ing to pump the moisture.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Super Trap
CRYO-T10
CRYO-T series is a pump that uses a one-stage type GM cryocooler. It is capable of high vacuum pumping ing to pump the moisture.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Super Trap
CRYO-T12
CRYO-T series is a pump that uses a one-stage type GM cryocooler. It is capable of high vacuum pumping ing to pump the moisture.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Super Trap
CRYO-TS10
CRYO-T series is a pump that uses a one-stage type GM cryocooler. It is capable of high vacuum pumping ing to pump the moisture.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Super Trap
CRYO-TS14
CRYO-T series is a pump that uses a one-stage type GM cryocooler. It is capable of high vacuum pumping ing to pump the moisture.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Super Trap
CRYO-TS22
CRYO-T series is a pump that uses a one-stage type GM cryocooler. It is capable of high vacuum pumping ing to pump the moisture.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.
Turbo Molecular Pump
Turbo molecular pumps are crucial devices for achieving high vacuum environments and are widely used in semiconductor manufacturing and research facilities. These pumps efficiently generate vacuum by moving molecules at high speeds.
A turbo molecular pump consists of a high-speed rotating rotor and a fixed stator. The blades of the rotor collide with molecules, accelerating them towards the exhaust, thereby creating a vacuum. This process utilizes the kinetic energy of the molecules, making it highly efficient.
Compared to other vacuum pumps, turbo molecular pumps offer exceptionally high pumping speeds, allowing for rapid establishment of vacuum environments. They provide a clean vacuum environment as they do not use oil, making them ideal for precision tasks such as semiconductor manufacturing. Additionally, they have a wide range of applicability, from low vacuum to ultra-high vacuum, and are utilized across various industries and research fields.
Turbo Molecular Pump
UTM-MS
New Product
This is a turbomolecular pump with a separate controller that uses magnetic bearings.We have a lineup of models with pumping speeds of 300 to 4000 L/s. The controller unit can monitor the operating status and supports various communication standards.
Turbo Molecular Pump
YTPｰB
YTP Series version B is a high vacuum pumping system with a ceramic ball bearing turbo molecular pump.Vacuum pumping from atmospheric pressure to high vacuum is possible. ULVAC prepares two types, SA type which allows the automatic pumping by START / STOP switch and M type which is a manual operation. In addition, the back pump can be selected from rotary pump as a standard specification, or dry scroll pump as the other selection.
Turbo Molecular Pump
YTP70A
Desktop high vacuum pumping station featuring a low noise, low vibration design and ceramic ball bearing turbo molecular pump.
Simple, easy to read touch screen control for user-friendly operation.
Turbo Molecular Pump
UTM-B
The compound turbo molecular pump with the ceramic ball bearings,and has excellent compression ratio. Compact design by integrated controller design. Excellent high back pressure performance allows to use smaller backing pump.
Turbo Molecular Pump
UTM-MI
Controller integrated turbo molecular pump with magnetic bearings saves wiring work and installation space.
Turbo Molecular Pump
VPT-060
A dry, compact, high-vacuum exhaust system in which the necessary equipment such as turbo molecular pump, dry vacuum pump, valve piping, and electrical system are compactly configured in a base frame.
Suitable for clean vacuum environment in semiconductor, analysis, inspection, science and chemistry, and pharmaceutical fields.
Ion Pump
Sputter ion pumps utilize electric and magnetic fields to ionize gas molecules. These ionized molecules are accelerated by the electric field and collide with the surface of a solid target. This collision embeds the molecules into the surface, creating a vacuum. This process is particularly effective for the removal of inert and reactive gases.
Sputter ion pumps can achieve ultra-high vacuum levels below 10^-11 Torr, making them ideal for precision experiments and manufacturing processes. They have no mechanical moving parts, which results in long lifespan and minimal maintenance. Additionally, because they do not use oil, they provide a clean and contamination-free vacuum environment. Compared to other vacuum pumps, sputter ion pumps offer the advantages of lower power consumption and higher energy efficiency.
Ion Pump
PST
Sputter ion pumps are used to create ultra-high vacuum for various analyzers and accelerators.
ULVAC's sputter ion pumps aredesigned to apply new elements and optimize magnetic fields for improving evacuation characteristics at ultra-high and extremely high vacuum.
Ion Pump
GST-07L-B
The GST-07L-B is a sputter ion pump controller which features sophisticated functions and high-grade reliability. It is the product of ULVAC' s extensive technological reserves and long track record of proven performance in the ultra-high vacuum field.
Oil Diffusion Ejector Pump
Oil diffusion vacuum pumps work by evaporating heated oil to generate oil vapor. This vapor is ejected at high speed through a nozzle, colliding with gas molecules. The collided gas molecules are carried along with the flow of oil vapor towards the exhaust, creating a vacuum. This process is particularly effective for applications requiring high vacuum levels.
Oil diffusion vacuum pumps can achieve high vacuum levels ranging from 10^-7 Torr to 10^-9 Torr, making them suitable for many industrial applications. Compared to other high vacuum pumps, they have a lower initial cost, making them economically accessible. Their simple structure ensures reliable and durable performance over long periods, and they are widely used across various fields such as semiconductor manufacturing, metal processing, and research and development.
Oil Diffusion Ejector Pump
ULK
ULK-type oil diffusion pump is a compact high vacuum pump designed with high critical back pressure.
It is used in a wide range of applications, from research to manufacturing line.
Oil Diffusion Ejector Pump
PFL
ULVAC oil diffusion pump PFL-type is designed and manufactured based on our extensive research and manufacturing experience. We meet customer's needs with 4 models line-up including 22B to 52B which are used in many high-vacuum production facilities, and its practical performance is highly appreciated.
Oil Diffusion Ejector Pump
PBL
ULVAC's oil diffusion ejector pumps are generally used in industrial processes to provide high pumping speed. They are particularly well-suited for use in metallurgy, plastic coating and chemical manufacturing, where large quantities of gas have to be pumped away as quickly as possible.
Oil Diffusion Ejector Pump
BW-02
This product prevents the backflow of oil vapor from the oil diffusion pump to the intake side.
Oil Diffusion Ejector Pump
BW-04B
This product prevents the backflow of oil vapor from the oil diffusion pump to the intake side.
Oil Diffusion Ejector Pump
BW-06B
This product prevents the backflow of oil vapor from the oil diffusion pump to the intake side.
Oil Diffusion Ejector Pump
BW-10
This product prevents the backflow of oil vapor from the oil diffusion pump to the intake side.
Oil Diffusion Ejector Pump
BW-14
This product prevents the backflow of oil vapor from the oil diffusion pump to the intake side.
Oil Diffusion Ejector Pump
BW-20
This product prevents the backflow of oil vapor from the oil diffusion pump to the intake side.
Oil Diffusion Ejector Pump
BW-22
This product prevents the backflow of oil vapor from the oil diffusion pump to the intake side.
Oil Diffusion Ejector Pump
BW-36
This product prevents the backflow of oil vapor from the oil diffusion pump to the intake side.
Oil Diffusion Ejector Pump
BW-52
This product prevents the backflow of oil vapor from the oil diffusion pump to the intake side.
Vacuum Pumping System
Vacuum exhaust units are products that combine a vacuum pump that can operate from atmospheric pressure with a vacuum pump that has an upper operating pressure limit, or products that have functions other than vacuum exhaust.
Vacuum Pumping System
VPC-051
It is a small type high vacuum pumping system that necessary parts are compactly placed in a pipe-framed stand.
It is easy to handle, maintain, and suitable for experiment.
Vacuum Pumping System
VPC-051A
It is a small type high vacuum pumping system that necessary parts are compactly placed in a pipe-framed stand.
It is easy to handle, maintain, and suitable for experiment.
Vacuum Pumping System
VPC-250F
It is a small type high vacuum pumping system that necessary parts are compactly placed in a pipe-framed stand.
It is easy to handle, maintain, and suitable for experiment.
Vacuum Pumping System
VFR-200M/X
It is the small high vacuum pumping system which stored compactly required apparatus, such as a main pump, backing pump, valve piping, an electric system, and a pressure measurement port, in the mount.
DEPOX series is preparing four types with which the composition of an exhaust system differs.
Handling is easy and ideal for an experiment.
Vacuum Pumping System
VWR-400M/X
It is the small high vacuum pumping system which stored compactly required apparatus, such as a main pump, backing pump, valve piping, an electric system, and a pressure measurement port, in the mount.
DEPOX series is preparing four types with which the composition of an exhaust system differs.
Handling is easy and ideal for an experiment.
Vacuum Pumping System
VTR-350M/X
It is the small high vacuum pumping system which stored compactly required apparatus, such as a main pump, backing pump, valve piping, an electric system, and a pressure measurement port, in the mount.
DEPOX series is preparing four types with which the composition of an exhaust system differs.
Handling is easy and ideal for an experiment.
Vacuum Pumping System
VTS-350M/X
It is the small high vacuum pumping system which stored compactly required apparatus, such as a main pump, backing pump, valve piping, an electric system, and a pressure measurement port, in the mount.
DEPOX series is preparing four types with which the composition of an exhaust system differs.
Handling is easy and ideal for an experiment.