Oil Diffusion Ejector Pump

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Oil diffusion vacuum pumps work by evaporating heated oil to generate oil vapor. This vapor is ejected at high speed through a nozzle, colliding with gas molecules. The collided gas molecules are carried along with the flow of oil vapor towards the exhaust, creating a vacuum. This process is particularly effective for applications requiring high vacuum levels.

Oil diffusion vacuum pumps can achieve high vacuum levels ranging from 10^-7 Torr to 10^-9 Torr, making them suitable for many industrial applications. Compared to other high vacuum pumps, they have a lower initial cost, making them economically accessible. Their simple structure ensures reliable and durable performance over long periods, and they are widely used across various fields such as semiconductor manufacturing, metal processing, and research and development.

Model:ULK

ULK-type oil diffusion pump is a compact high vacuum pump designed with high critical back pressure.
It is used in a wide range of applications, from research to manufacturing line.

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Oil Diffusion Ejector Pump

Model:PFL

ULVAC oil diffusion pump PFL-type is designed and manufactured based on our extensive research and manufacturing experience. We meet customer's needs with 4 models line-up including 22B to 52B which are used in many high-vacuum production facilities, and its practical performance is highly appreciated.

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Oil Diffusion Ejector Pump

Model:PBL

ULVAC's oil diffusion ejector pumps are generally used in industrial processes to provide high pumping speed. They are particularly well-suited for use in metallurgy, plastic coating and chemical manufacturing, where large quantities of gas have to be pumped away as quickly as possible.

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