Turbo Molecular Pump
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Turbo molecular pumps are crucial devices for achieving high vacuum environments and are widely used in semiconductor manufacturing and research facilities. These pumps efficiently generate vacuum by moving molecules at high speeds.
A turbo molecular pump consists of a high-speed rotating rotor and a fixed stator. The blades of the rotor collide with molecules, accelerating them towards the exhaust, thereby creating a vacuum. This process utilizes the kinetic energy of the molecules, making it highly efficient.
Compared to other vacuum pumps, turbo molecular pumps offer exceptionally high pumping speeds, allowing for rapid establishment of vacuum environments. They provide a clean vacuum environment as they do not use oil, making them ideal for precision tasks such as semiconductor manufacturing. Additionally, they have a wide range of applicability, from low vacuum to ultra-high vacuum, and are utilized across various industries and research fields.
Turbo Molecular Pump
UTM-MS
New Product
This is a turbomolecular pump with a separate controller that uses magnetic bearings.We have a lineup of models with pumping speeds of 300 to 4000 L/s. The controller unit can monitor the operating status and supports various communication standards.
Turbo Molecular Pump
YTPｰB
YTP Series version B is a high vacuum pumping system with a ceramic ball bearing turbo molecular pump.Vacuum pumping from atmospheric pressure to high vacuum is possible. ULVAC prepares two types, SA type which allows the automatic pumping by START / STOP switch and M type which is a manual operation. In addition, the back pump can be selected from rotary pump as a standard specification, or dry scroll pump as the other selection.
Turbo Molecular Pump
YTP70A
Desktop high vacuum pumping station featuring a low noise, low vibration design and ceramic ball bearing turbo molecular pump.
Simple, easy to read touch screen control for user-friendly operation.
Turbo Molecular Pump
UTM-B
The compound turbo molecular pump with the ceramic ball bearings,and has excellent compression ratio. Compact design by integrated controller design. Excellent high back pressure performance allows to use smaller backing pump.
Turbo Molecular Pump
UTM-MI
Controller integrated turbo molecular pump with magnetic bearings saves wiring work and installation space.
Turbo Molecular Pump
VPT-060
A dry, compact, high-vacuum exhaust system in which the necessary equipment such as turbo molecular pump, dry vacuum pump, valve piping, and electrical system are compactly configured in a base frame.
Suitable for clean vacuum environment in semiconductor, analysis, inspection, science and chemistry, and pharmaceutical fields.