Pulsed and DC power supply systems
Bipolar unit _MFU
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Retrofit Bipolar Unit to Achieve a Better Deposition Process
Bipolar unit _MFU
Model:MFU-20K
The MFU, which is available as an external unit for DC power supplies, is an MF power supply for use in sputtering of dual cathodes. It is effective not only for metal films but also for reactive deposition. Stable sputtering is achieved without the loss of the anode.