RF Power System
RF power supply_N series
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The N Series RF Power Supply offers high versatility by allowing a wide matching range through adjustments to the matching unit settings, enabling compatibility with various loads. Additionally, it achieves a compact and lightweight design by incorporating a high-efficiency RF amplifier.
Furthermore, the RF power supply unit features a built-in auto-matching controller, which eliminates the need for additional external devices. This integration allows seamless control of both power output and the matching system. The N Series represents a next-generation RF power supply system that combines high performance and convenience.
RF power supply_N series
Model:N
The "Model:RFS-N" is a 13.56MHz, 0.5kW/1/kW/3kW/5kW output RF power supply for plasma processing. Equipped with a high-efficiency RF amplifier, it is compact and lightweight.
In addition, the RF power supply has a built-in auto-matching controller function, so it is possible to control the power of the RF power supply and the matching system with only the main unit.