RF Power System
Built-in matcher_RF power supply_RMG
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The RMG is an innovative RF power supply system that integrates an RF power supply and a matching unit into a single unit. By combining these elements, which are typically separate components, the system achieves a lightweight and compact design, making it suitable for experimental and trial applications.
Additionally, it allows precise control even at low power outputs, making it applicable across a wide range of fields, from research and development to mass production equipment. The RMG offers a flexible and convenient RF power solution.
Built-in matcher_RF power supply_RMG
Model:RMG-1303
The RMG-1303 is a 13.56MHz, 300W RF power supply with built-in output matcher for plasma processes such as RF sputtering and plasma CVD etching. The integration of the matcher and the RF power supply makes it smaller and lighter. It can be controlled from low output, and can be used in a wide range of fields, from R&D applications to mass production equipment.