Introduction of vacuum equipments manufactured by ULVAC Group.
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A process gas monitor is a device designed to measure and monitor the concentration and management of process gases in various manufacturing processes with high precision in real-time. Utilizing the quadrupole principle, it detects gas components and provides accurate gas composition data. This enables quality improvement and enhanced production efficiency in fields such as electronic devices and semiconductors, where strict gas control is essential.
Pump Type
Sputtering Process
The process gas monitor Qulee CGM2 Series is a gas analysis device designed for sputtering processes. It is ideal for leak monitoring, residual moisture monitoring, and monitoring other impurities. It enables yield management and improves production efficiency.
Sputtering Process
CGM2-051 / 052
"Qulee" (pronounced as "KLEE"), is ULVAC's latest model for residual gas analysis and gas monitoring during process. Feedback from facility engineers in various production lines are incorporated in the new product design offering utmost simplicity.
The Qulee offers high accuracy and resolution even at high pressure (1Pa or less).
Sputtering Process
CGM2-101 / 102
New Product
The "Qulee" (pronounced "KLEE") is ULVAC's latest model for residual gas analysis and gas monitoring during the process. Feedback from equipment engineers on each production line has been incorporated into the new product design in pursuit of simplicity.
Measurements can be made with high accuracy at the process pressure of the sputtering equipment (less than 1 Pa) without using a differential exhaust system.
Basic Process
The process gas monitor Qulee BGM2 Series is a gas analysis device designed for evaporation equipment and various vacuum furnace processes. It is optimal for leak monitoring, residual moisture monitoring, and monitoring other impurities. It enhances yield management and boosts production efficiency.
Basic Process
BGM2-101 / 102
"Qulee" (pronounced as "KLEE"), is ULVAC's latest model for residual gas analysis. Feedback from
facility engineers in various production lines are incorporated in the new product design offering
utmost simplicity.(Ethernet compatible)
Basic Process
BGM2-201 / 202
"Qulee" (pronounced as "KLEE"), is ULVAC's latest model for residual gas analysis. Feedback from
facility engineers in various production lines are incorporated in the new product design offering
utmost simplicity.(Ethernet compatible)
High Performance Process
The process gas monitor Qulee HGM2 Series is ULVAC's high-end device capable of analysis under high and ultra-high vacuum conditions. It achieves a minimum detectable partial pressure in the 10??? Pa range, making it ideal for various research and development applications, as well as analysis under ultra-high and extreme vacuum conditions.
High Performance Process
HGM2-202
ULVAC's new "Qulee HGM2" residual gas analyzer series with revolutionary simplicity of use.
Offers highest sensitivity of all models at 2.5 × 10 -6A/Pa, Qulee HGM2.
Can meet the needs of various R&D and other vacuum system proce ss monitoring.(Ethernet compatible)
High Performance Process
HGM2-302
ULVAC's new "Qulee HGM2" residual gas analyzer series with revolutionary simplicity of use.
Offers highest sensitivity of all models at 2.5 × 10 -6A/Pa, Qulee HGM2.
Can meet the needs of various R&D and other vacuum system proce ss monitoring.(Ethernet compatible)
High Pressure Process
The process gas monitor Qulee with YTP-H Vacuum Specification is capable of analysis tailored to the pressure specifications (3000 Pa to 10?? Pa) of customers' vacuum equipment. It supports leak monitoring, residual moisture monitoring, and impurity monitoring for various vacuum furnaces.
High Pressure Process
Qulee with YTP-H For Vacuum (1, 10, 100, 500, 3000Pa)
A variation of Qulee, adding new features in response to customer needs.
By adding a differential pumping unit, the Qulee provides measurement and analysis capabilities for
process management and residual gas analysis.
Atmospheric Pressure Environmental Process
The process gas monitor Qulee with YTP-H Atmospheric Pressure Specification is a gas analyzer capable of measurements under atmospheric pressure conditions. It enables real-time analysis of decarbonization-related measurements, environmental monitoring, catalytic reaction analysis, and exhaust gas analysis.
Atmospheric Pressure Environmental Process
Qulee with YTP-H For Atmospheric Pressure
A variation of Qulee, adding new features in response to customer needs.
By adding a differential pumping unit, the Qulee provides measurement and analysis capabilities for
process management and residual gas analysis.
CVD / ALD / Etching Process
The process gas monitor Qulee RGM2 Series is a gas analysis device designed for CVD, etching, and ALD processes. It allows for long-term stable measurements even under reactive and corrosive gas conditions. In addition to endpoint monitoring in cleaning processes, it is also optimal for leak monitoring, residual moisture monitoring, and monitoring other impurities. It is best suited for yield management and improves production efficiency.
CVD / ALD / Etching Process
RGM2-201F
The Qulee RGM2-201 F reactive process gas monitor is a process monitor with a differential exhaust system that supports reactive gases such as etching, CVD and ALD equipment of the Qulee series. With the unique ion source and exhaust system structure of Alvac, it has excellent corrosion resistance for reactive gases and can be measured stably for a long time.
CVD / ALD / Etching Process
RGM2-202
This process monitoring system has been developed for various kinds of applications such as etch, CVD and other reactive gas processes.
Using ULVAC's original ion source and pumping system enables you to achieve stable measurements results.
CVD / ALD / Etching Process
RGM2-302
This process monitoring system has been developed for various kinds of applications such as etch, CVD and other reactive gas processes.
Using ULVAC's original ion source and pumping system enables you to achieve stable measurements results.
Software for Gas Analysis
Software for Gas Analysis
Qulee QCS Ver.4.2
"Qulee QCS" is a software package for gas analyzers and process monitors manufactured by ULVAC."Qulee QCS" is suitable for all Quadrupole gas spectrometers made by ULVAC.
Older software can be upgraded to this QCS version.Data acquisition and saving data is carried out by simple key s trokes.