Film Forming Equipment Optional Parts｜Small Film Forming Equipment｜Products｜ULVAC SHOWCASE

Film Forming Equipment Optional Parts

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These are options for ULVAC's deposition equipment.

Evaporative Power Supply SEREM Series

Sample Holder

Other

Film Forming Equipment Optional Parts

PSE Series



Evaporation Electrode. (with an external aut0matic control function) Control can be done by the combination of the deposition controller and temperature controller according to specifications.



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Film Forming Equipment Optional Parts

Bell jar cover



Protection and handles for glass bell jar.



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Film Forming Equipment Optional Parts

Bell jar holder



Bell jar holder is usefully to attach a bell jar and remove.



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Film Forming Equipment Optional Parts

Adhesion shield plate



Prevention from thin film adhesion to a bell jar cover inside.



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Film Forming Equipment Optional Parts

Metal bell jar (with water cooling tube)

It is an object for overheating prevention of s bell jar.

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Film Forming Equipment Optional Parts

Electrode partition



For prevention of contamination.



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Film Forming Equipment Optional Parts

Substrate heating device 350℃



It is a set including a heating stand for heating a substrate, and a measurement apparatus.



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