Film Forming Equipment Optional Parts｜Small Film Forming Equipment｜Products｜ULVAC SHOWCASE

Film Forming Equipment Optional Parts

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These are options for ULVAC's deposition equipment.

Evaporative Power Supply Model:SEREM

Sample Holder

Other

Film Forming Equipment Optional Parts

Model: PSE



Evaporation Electrode. (with an external aut0matic control function) Control can be done by the combination of the deposition controller and temperature controller according to specifications.



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Film Forming Equipment Optional Parts

Bell jar cover



Protection and handles for glass bell jar.



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Film Forming Equipment Optional Parts

Bell jar holder



Bell jar holder is usefully to attach a bell jar and remove.



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Film Forming Equipment Optional Parts

Adhesion shield plate



Prevention from thin film adhesion to a bell jar cover inside.



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Film Forming Equipment Optional Parts

Metal bell jar (with water cooling tube)

It is an object for overheating prevention of s bell jar.

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Film Forming Equipment Optional Parts

Electrode partition



For prevention of contamination.



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Film Forming Equipment Optional Parts

Substrate heating device 350℃



It is a set including a heating stand for heating a substrate, and a measurement apparatus.



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