Introduction of vacuum equipments manufactured by ULVAC Group.

Vacuum transfer robots play the following roles: ・Wafer and Substrate Transfer They eliminate the need for manual operations, enabling efficient processes while maintaining the vacuum environment. ・High-Precision Positioning They accurately position wafers or substrates at their destinations, ensuring process precision in subsequent steps. ・Contamination Prevention In vacuum environments, particle contamination is a significant issue. Vacuum transfer robots minimize this risk through non-contact transfer and clean design. ・Process Automation and Efficiency They enable automated transfer that supports continuous process flow, reducing processing time and labor costs. ・Adaptation to High-Temperature and Special Environments Vacuum environments often experience temperature and pressure fluctuations. These robots are designed to maintain high reliability even under such conditions. ・Productivity Improvement By utilizing vacuum transfer robots, overall process throughput is improved, allowing flexible support for both small-batch, high-mix production and large-scale manufacturing.