Vacuum transfer robot
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ULVAC’s vacuum transfer robots, developed based on extensive expertise as a vacuum equipment manufacturer, offer clean and highly reliable performance in vacuum handling applications.
We offer a wide range of products compatible with various vacuum equipment. Our lineup includes different types of arms designed to meet specific equipment specifications, such as the number of hands, rotation radius, and stroke. By utilizing high-rigidity arms and highly reliable actuators, we ensure stable transfer operations. Additionally, some models are capable of operating in high-vacuum environments down to 10?? Pa.
COVOT
Hi-Throughput Vacuum Transfer Robot Capable of Handling Multiple Wafers
COVOT
Model:COVOT
It is a clean and versatile vacuum transfer robot that incorporates ULVAC's technology cultivated as a vacuum equipment manufacturer.
ELEC-RZ
Compact, Versatile Vacuum Transfer Robot Suitable for High-Vacuum Environments
ELEC-RZ
Model:ELEC-RZ
ELEC-RZ is a high-vacuum-compatible transfer robot that is compact and low-cost based on the excellent functions and performance of the "Model:COVOT".