COVOT｜Vacuum transfer robot｜Vacuum transfer robot｜Products｜ULVAC SHOWCASE

Vacuum transfer robot
COVOT

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Hi-Throughput Vacuum Transfer Robot Capable of Handling Multiple Wafers

COVOT

Model:COVOT

It is a clean and versatile vacuum transfer robot that incorporates ULVAC's technology cultivated as a vacuum equipment manufacturer.

For more information of the products
To ULVAC Group Product List

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