Mechanical Booster Pump
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Mechanical booster pumps are pumps that dramatically increase pumping speed.
By combining them with roughing pumps such as oil rotary vacuum pumps and dry pumps, they can significantly increase the pumping speed in pressure ranges where the pumping speed of roughing pumps drops.
They are used in many fields, including semiconductor processes, vacuum distillation, vacuum packaging, degassing, thin films, vacuum metallurgy, low-density wind tunnel experiments, space development, vacuum impregnation, and vacuum drying.
Mechanical booster pumps have two cocoon-shaped rotors inside a casing that fit into a drive gear at the end of the shaft and rotate synchronously in opposite directions. Gas that enters from the intake port is trapped in the space between the casing and the rotors, and is exhausted to the exhaust port side as the rotors rotate, and then released into the atmosphere by the auxiliary pump at the rear. The rotors rotate while maintaining a small gap (0.1 to 0.3 mm) without coming into contact with each other or the casing, and transport gas, so no lubricating oil is required inside the rotor chamber. This makes it possible to achieve a vacuum exhaust with little contamination from oil vapor.
Mechanical Booster Pump
PMB-D
The PMB series Ver. D is a wide use mechanical booster pump with multiple voltage motor (high efficiency). It is possible to run with air-cooled depending on use condition. And surface treatment and atmospheric operation type are selectable as option.
Mechanical Booster Pump
PRC
By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops. The PRC series is designed for semiconductor and liquid crystal display processes which especially require cleanliness. Atmospheric pressure start type can be selected as option.
Mechanical Booster Pump
PMB-C
By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops.
Mechanical Booster Pump
MBS-053
Toots type / Display by Actual Pumping Speed / With protective functions