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双阴极用双极元件
MFU 系列
MFU-20K
ULVAC
MFU-20K是通过与ULVAC制DC电源组合，将直流输出转换为双极脉冲输出的单元。
以低成本实现良率和产量的提高。
以低成本实现良率和产量的提高。
特点
- 频率范围宽
可以在10kHz～100kHz的范围内 ※1 - 主/从连接允许大容量
最多可以进行6台并行操作 - 可以DC输出
输入DC电源的输出可以照原样施加到阴极 ※2
用途
- FPD用反应溅射设备
- 工业涂层用反应溅射设备
- 彩色TFT用反应溅射设备
- 一般溅射设备
规格
| Model | MFU-20K | |
| Control power input | Rated input voltage | AC100V/AC240V |
| Input voltage fluctuation range | AC90 to 264V | |
| Phase, frequency | 1 phase 50/60Hz | |
| Input capacity | 400VA | |
| Input Specification | Operating voltage | 0 to -1000V※1 |
| Non load voltage | -1200V | |
| Operating current | 50A | |
| Output Specification | Maximum rated voltage | 1000V（RMS）※1 |
| Non load voltage | DC-1200V | |
| Maximum Rated current | 50A | |
| Oscillating frequency | 10k to 100kHz※2 | |
| Duty cycle | 10 to 90％※3 | |
| Cooling method | Forced air-cooling | |
| Dimension（W×D×H） | 483mm×630mm×177mm（excluding protrusions） | |
| Weight | 37kg | |
| Applicable standard | CE/SEMI F47/RoHS | |
Ambient operating temperature 5℃ ～ 40℃（no condensation）
Operating environment: Avoid direct sunlight, heat, dust, vibration, and without corrosive gas.
※1: The frequency is subject to a limit at voltage more than 800V.
※2: The output is subject to a limit at frequency more than 60kHz.
※3: The duty cycle is limited depending on the oscillating frequency.
