双阴极用双极元件

MFU 系列

MFU-20K

アルバック

MFU-20K是通过与ULVAC制DC电源组合,将直流输出转换为双极脉冲输出的单元。
以低成本实现良率和产量的提高。

特点

  • 频率范围宽
    可以在10kHz~100kHz的范围内 ※1
  • 主/从连接允许大容量
    最多可以进行6台并行操作
  • 可以DC输出
    输入DC电源的输出可以照原样施加到阴极 ※2

用途

  • FPD用反应溅射设备
  • 工业涂层用反应溅射设备
  • 彩色TFT用反应溅射设备
  • 一般溅射设备

规格

Model MFU-20K
Control power input Rated input voltage AC100V/AC240V
Input voltage fluctuation range AC90 to 264V
Phase, frequency 1 phase 50/60Hz
Input capacity 400VA
Input Specification Operating voltage 0 to -1000V※1
Non load voltage -1200V
Operating current 50A
Output Specification Maximum rated voltage 1000V(RMS)※1
Non load voltage DC-1200V
Maximum Rated current 50A
Oscillating frequency 10k to 100kHz※2
Duty cycle 10 to 90%※3
Cooling method Forced air-cooling
Dimension(W×D×H) 483mm×630mm×177mm(excluding protrusions)
Weight 37kg
Applicable standard CE/SEMI F47/RoHS

Ambient operating temperature 5℃ ~ 40℃(no condensation)
Operating environment: Avoid direct sunlight, heat, dust, vibration, and without corrosive gas.
※1: The frequency is subject to a limit at voltage more than 800V.
※2: The output is subject to a limit at frequency more than 60kHz.
※3: The duty cycle is limited depending on the oscillating frequency.

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