MFU-20K

アルバック

MFU-20K是通过与ULVAC制DC电源组合，将直流输出转换为双极脉冲输出的单元。
以低成本实现良率和产量的提高。

特点

频率范围宽
可以在10kHz～100kHz的范围内 ※1
主/从连接允许大容量
最多可以进行6台并行操作
可以DC输出
输入DC电源的输出可以照原样施加到阴极 ※2

用途

FPD用反应溅射设备
工业涂层用反应溅射设备
彩色TFT用反应溅射设备
一般溅射设备

规格

Model		MFU-20K
Control power input	Rated input voltage	AC100V/AC240V
	Input voltage fluctuation range	AC90 to 264V
	Phase, frequency	1 phase 50/60Hz
	Input capacity	400VA
Input Specification	Operating voltage	0 to -1000V^※1
	Non load voltage	-1200V
	Operating current	50A
Output Specification	Maximum rated voltage	1000V（RMS）^※1
	Non load voltage	DC-1200V
	Maximum Rated current	50A
	Oscillating frequency	10k to 100kHz^※2
	Duty cycle	10 to 90％^※3
Cooling method		Forced air-cooling
Dimension（W×D×H）		483mm×630mm×177mm（excluding protrusions）
Weight		37kg
Applicable standard		CE/SEMI F47/RoHS

Ambient operating temperature 5℃ ～ 40℃（no condensation）
Operating environment: Avoid direct sunlight, heat, dust, vibration, and without corrosive gas.
※1: The frequency is subject to a limit at voltage more than 800V.
※2: The output is subject to a limit at frequency more than 60kHz.
※3: The duty cycle is limited depending on the oscillating frequency.

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可选部件・消耗品

规格

Model		MFU-20K
Control power input	Rated input voltage	AC100V/AC240V
	Input voltage fluctuation range	AC90 to 264V
	Phase, frequency	1 phase 50/60Hz
	Input capacity	400VA
Input Specification	Operating voltage	0 to -1000V^※1
	Non load voltage	-1200V
	Operating current	50A
Output Specification	Maximum rated voltage	1000V（RMS）^※1
	Non load voltage	DC-1200V
	Maximum Rated current	50A
	Oscillating frequency	10k to 100kHz^※2
	Duty cycle	10 to 90％^※3
Cooling method		Forced air-cooling
Dimension（W×D×H）		483mm×630mm×177mm（excluding protrusions）
Weight		37kg
Applicable standard		CE/SEMI F47/RoHS