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Bipolar unit for dual cathode
MFU Series
MFU-20K
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MFU-20K is a unit which converts the DC output into bipolar pulse output, by adding to ULVAC DC power generator. It contributes to improved productivity and throughput at low cost.
Features
- Wide frequency range
Can be operated from 10k ～ 100kHz ※1 - Enables the larger capacity by a master/slave connection
Parallel operation of maximum six MFU-20K is possible - DC output is possible
It is possible to apply an output of input DC power generator to a cathode directly ※2
Applications
- Reactive sputtering equipment for FPD
- Reactive sputtering equipment for industrial coating
- Reactive sputtering equipment for color TFT
- All sputtering equipment
Specifications
| Model | MFU-20K | |
| Control power input | Rated input voltage | AC100V/AC240V |
| Input voltage fluctuation range | AC90 to 264V | |
| Phase, frequency | 1 phase 50/60Hz | |
| Input capacity | 400VA | |
| Input Specification | Operatig voltage | 0 to -1000V※1 |
| Non load voltage | -1200V | |
| Operatig current | 50A | |
| Output Specification | Maximum rated voltage | 1000V（RMS）※1 |
| Non load voltage | DC-1200V | |
| Maximum Rated current | 50A | |
| Oscillating frequency | 10k to 100kHz※2 | |
| Duty cycle | 10 to 90％※3 | |
| Cooling method | Forced air-cooling | |
| Dimension（W×D×H） | 483mm×630mm×177mm（excluding protrusions） | |
| Weight | 37kg | |
| Applicable standard | CE/SEMI F47/RoHS | |
Ambient operating temperature 5℃ ～ 40℃（no condensation）
Operating environment: Avoid direct sunlight, heat, dust, vibration, and without corrosive gas.
※1: The frequency is subject to a limit at voltage more than 800V.
※2: The output is subject to a limit at frequency more than 60kHz.
※3: The duty cycle is limited depending on the oscillating frequency.
