DC Power Supply|Products|ULVAC SHOWCASE

DC Power Supply

DC power supply designed for sputtering system. It has high versatility and reliability based on our nowhow including application. Our DC power supply lineup has various features.


  • Select series
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  • Small Capacity DC Power Supply
  • Large Capacity DC Power Supply
  • Abnormal Discharge Prevention Unit
  • Bipolar unit for dual cathode

Maximum Rated Power

Rated Voltage

Oscillation Frequency

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