Introduction of vacuum equipments manufactured by ULVAC Group.

This system can measure Seebeck coefficient and electrical resistivity in the thickness direction and also evaluate the thermoelectric properties on anisotropic materials at the same measurement direction.

Simultaneously measures the Seebeck coefficient and electric conductivity of thermoelectric materials.
Based on requests from both domestic and international academic societies and customers, this system features our easy to use, high-precision measurement techniques. Complies with JIS standards for thermoelectric material Seebeck coefficient measurement equipment.

A series corresponding to special specifications for the properties of various thermoelectric materials and thin films.
A higher level evaluation for various kinds of materials has been required along with the development of thermoelectric materials. This system "Seebeck Coefficient / Electric Resistance. Measuring System ZEM-5 series" is specialized in the features of various kinds of materials such as high temperature, high resistance and thin film, etc. and a performance evaluation system to correspond to various kinds of needs.

The system can evaluate the power generation and heat flow that can be gathered when the temperature difference is given to thermoelectric module in the environment(in atmosphere and under load) and conversion efficiency that can be calculated from maximum power generation and heat flow. In addition, this system can conduct long-hours operation and heat cycle tests of thermoelectric modules and can be used for testing newly developed modules as well as for durability tests under load and temerature in which commercially available modules are actually incorporated.

Property evaluations of thermoelectric generator modules
By applying a maximum 500℃ temperature difference across a thermoelectric generator module, this system finds the thermoelectric conversion rate η by finding the power that is generated P when a one-dimensional heat flow Q is passed through the module.

Measure thermoelectric conversion efficiency for thermoelectric material alone and a pair of thermoelectric material
This system can evaluate not only power generation but also conversion efficiency of thermoelectric modules. The conversion efficiency is evaluated from current dependency of power generation measured with four-probe method and heat flow measured with heat flow meter.
High temperature part can reach up to 500 ℃(standard specifications), while low temperature part is cooled with water flow.

Thermal conductivity measurements covering a wide range of materials not only thermoelectric materials but also metals, ceramics, carbon etc.
The systems measure 3 thermal constants (Thermal diffusivity, Specific heat capacity, Thermal conductivity) for uniform solid materials such as thermoelectric materials, ceramics, carbon, Metal, etc.

2 dimensional distribution of Seebeck coefficient and thermal conductivity measurement system by thermal probe.
STPM-1000 is used for evaluating Seebeck coefficient and thermal conductivity simultaneously. Simple evaluation of thermoelectric materials is possible by simultaneous evaluations of seebeck coefficient and thermal conductivity. The thermal conductivity distribution evaluation of functionally graded materials, multilayer substrates and organic materials is also possible. STPM-1000 is expected to use materials evaluation as a basic tool.

Capable of evaluation of heat radiation film in the thickness direction and anisotropy.
The most suitable system for the evaluations of heat dissipation films etc. By using Xenon lamp, it enables to minimize the damage to the sample. Sample anisotropy can also easily measure by using the original attachment as an option.

Thermal conductivity evaluation for a nano thin film at normal direction.
TCN-2ω is the world's only system which can measure thermal conductivity for a nano thin film at normal direction.

Thermal conductivity evaluation in-plane direction of films, thin sheets and thin films etc.
This system can measure thermal diffusivity of sheet materials in-plane direction by scanning laser heating AC method (Angstrom method).
About high thermal conducting films, sub-micron thin films can also be measurable.

Easily evaluate thin film materials that are difficult to measure with the flash method
This system measures thermal diffusivity in the thickness direction of solids such as film polymers, paper, and ceramics by using the AC joule heating method.
With specialized in room temperature measurement only, which is highly needed, a compact body and low cost have been achieved.

Thermal conductivity evaluations of polymers and glass.
A heat-flow method Steady Method Thermal Conductivity Measurement System that complies with the US ASTM E1530 standard.
This system measures comparatively low-thermal conductivity materials over a temperature range of 50 to 280℃.

Heating up to 3000K within one second!
This system measures thermophysical properties by applying current directly to a sample to heat up to higher temperature within one second. Measurable standard properties are electrical resistivity, total emissivity, specific heat capacity, thermal expansion rate and thermal diffusivity.

Temperature dependency measurement of insulator samples.
This system can measure the temperature dependency of insulators like ceramics, plastics and glass.

Metallic phase transition, aging, recrystallization reaction
This system can measure precisely the electric resistance of metallic alloys and semiconductors with DC four-thermal method.

Measures specific heat capacity, latent heat, transformation points
Capable of precisely measuring specific heat capacity, latent heat, and transformation points with the adiabatic control method.

Dedicated thermal expansion measurement system for bulk materials
Dedicated linear expansion and contraction measurement system for various solid samples

Labour-saving quality management with fully automatic and unattended operationuality control.
This system was developed for the purpose of standardizing the measurement and saving labor in quality management. With superior repeatability, safety measures for unattended operation and chart function, this system is most suitable for quality management.

High-accuracy measurement of thermal expansion with a minimum resolution of 1nm
This is a laser thermal expansion measurement system with ultra-high sensitivity developed by the use of the latest optical techniques. This system is suitable to be used as a calibration system for a standard thermal dilatometer, also to measure absolute thermal expansion measurements of unknown samples. This system is compliant with JIS R3251-1995, Measuring method of the linear thermal expansion coefficient for low expansion glass by laser interferometry.

Capable of viscoelasticity measurements in various atmospheres
Measures the thermal expansion and contraction of solid samples.
Capable of stress relaxation measurements. Capable of performing thermal expansion measurements by tension to film materials.

The TGD-9000 series is capable of performing TG/DTA measurements in a wide range of temperatures from room temperature to ultra-high temperature regions.
Models equipped with the Infrared Gold Image Furnace can perform measurements with various heating conditions.

A high-sensitivity sensor is standard equipment on all models
Achieves a high-stability baseline through its precise thermal design.

This system evaluates saturated vapor pressure and the thermal behavior of organic materials. An exhaust method is employed that allows stable measurements even in a vacuum. Achieves precise temperature controllability and responsiveness with the Infrared Gold Image Furnace

Easy purification of Organic materials
General organic pigment is poor in purity, containing lots of impurity. Therefore the property of the thin film roduced in a condition poor in purity does not show its original features, varying with the impurity. This system can produce highly pure organic materials.

Meeting customer needs with infrared lamp heating
Infrared Gold Image Furnaces can be used in many fields for research and development or as production equipment.
We're meeting the needs of our customers from high speed heating to wide area heating.

Useable in wide fields from carbon nanotube growth equipment to production equipment.
The flat plate reflected infrared heating furnace can be used for applications such as a 2-inch to 300 mm diameter wafer lamp annealing system or a production baking furnace.

Temperature controller capable of supporting high-speed heating with good precision.
This programmable temperature controller can support not only Infrared Gold Image Furnaces that require a fast response during high-speed heating , but also low-speed heating furnaces.
It features high functionality and high performance in a compact package and meets your needs with a low price and many accessories.

High speed heat treatment from 2 inches to 300 mm 10 seconds until retention. Infrared lamp heating is the method which can take advantage of its features of High energy density, Near infrared rays, High heat responsiveness, Temperature controllability, and Cold wall method.

This infrared lamp heating system with parabolic type reflectors can heat uniformly a wafer of the size up to 6 inches. It is capable of high-speed heat treatment, the most available for the research and development of heat treatment process. Silicide formation in individual semiconductor process and process annealing of compound semiconductor are available.

This system is a Mini Lamp Annealer that enables the heat treatment up to 50mm square size samples.
MILA-5000 series, the current models which are available for up to 20mm square size samples, have been velued by many customers since their release. But in response to increased number of demands from customers that they want to heat bigger samples, this new system, available for heat treatment of up to 50mm square size samples has been developed with still having a compact body in which heating furnace, chamber and temperature controller are all integrated.

A desktop lamp heating device that does not use cooling water.
As the air cooling fan is used, the device can be used immediately if there is an outlet.

Simplified system with Infrared Gold Image Furnace and a quartz chamber.
A low-cost heating system consist of an Infrared Golc Image Furnace and quartz chamber including a sample holder.

Helping process development From solar cells to compound semiconductors.
Combining an Infrared Gold Image Furnace and temperature controller, the QHC/VHC series is a compact high speed heating/ cooling system equipped with a quartz heat treatment chamber.
The system is customizable to your needs.

Heating up to 1800℃ in just 1 min. For ultra-high temperature vacuum heat treatment MIRO series is a compact spot focused Gold Image Furnace which enables to heat up to 1800℃ with extremely high reflection efficiency in combination with single or double type chambers.

Rapid heating and quenching of materials
This system is capable of water quench after heating. The maximum temperature is 1800℃ under various atmospheres.

Heating a small piece of sample up to 1800°C just in 10 seconds.
HT-RTA59HD is a desktop-type lamp annealing system which enables a small piece of sample to heat up to 1800°C (Ultrahigh temperature zone) just in 10 seconds with high reflection efficiency by spot focused heating.

Heationg system according to heat treatment objective
This heating system is desiged based on the shape of the material and the heat treatment objective in the process.
By making maximum use of high-speed heating, cooling and clean heating, we provide heating furnaces with non-polluting, low energy and high functionality.

Easy determination of transformation point of steel sheets
The CAS series achieves high-speed heating and cooling with the use of an Infrared Gold Image Furnace, direct temperature control of the samples, and easy atmosphere production. This system makes it possible to precisely achieve thermal treatment simulations of processes for steel and iron materials that had been previously difficult. Supports general purpose heat treatment tests to process heat treatment simulation tests of materials such as steel sheets, steel plates, stainless steel sheets, and magnetic steel sheets.

Vivid observations with image heating and the latest optical system
Capable of observations of the crystal transformation, deposition, and solidification of metallic materials, capable of observations of the molten state and deposits of various materials, and capable of thermal cycle measurements of polymer materials from crystals → molten → re-solidification

This system can rapidly heat and cool metal samples in temperature ranging from room temperature to maximum 1350℃ and with curve lines of time-temperature and displacement(length) taken from the heating and cooling process, transformation point(temperature) can be measured.
The sub-zero mechanism uses the latent heat of vaporization from liquid nitrogen and allows measurements down to -150℃.

With pressing a conical indenter against a small sample, creep behavior can be measured under high temperature.
With the Micro-Indentation Tester based on new principles, this system does not require large samples like past systems.

Quantitative analysis of carbon and nitrogen in steel and iron
This system measures the internal friction of steel and iron by the free vibration decay method.

Simultaneous deposition of different "targets"
By adding this source to APD series or your vacuum chamber, different "targets" can be deposited simultaneously and materials with new characters can be produced.

New nanoparticle deposition system using pulse vacuum arc discharge
Pulse vacuum arc deposition is a unique technique to deposit ultrathin films and nanoparticles by generating metal ions in a simple process. This system can achieve high in terms of film flatness and particle fineness, which is impossible with other systems.

Capable of precise observations of substrate and ingot wettability
This system has been commercialized as a compact, low-cost high-temperature wettability test/contact angle measurement system based on the wettability test/contact angle measurement system delivered to the Japan Aerospace Exploration Agency in 1993. This system can perform measurements by the static drop method. The extruded liquid drop method is also available(optional).

Direct measurement of surface properties and interactions Unique system that can also handle opaque samples. This system, coming from the existing Resonance Shear Measurement System [RSM-1] without the function to measure the resonance shear, focuses on the functions to measure the surface force.
This system can measure the distance dependence of interactions and adsorption forcse produced between two surfaces. With the twin-path method (two-beam interferometry technique), measurement of opaque materials is also available and with the focused heating system (option), the sample temperature can be changed from room temperature up to 100℃. The function to measure the resonance shear can be added on later.
※This system is a co-development by prof.Kurihara laboratory of Tohoku University.

This system can evaluate viscosity, friction, and lubrication characteristics in liquids at nano-scale thicknesses.
This system can evaluate nanotribological behavior, viscosity, friction, and lubrication characteristics of liquids as a function of distance.
Evaluations of electric double layer power, surface potential, adhesive force, adsorption characteristics, and intermolecular interaction.

Reach a target temperature for a short time, Mass analysis of up to 200amu is available
This system can measure the gas desorbed from a sample with a quadro-pole mass filter after heating up to a target temperature.

Measure the absolute amount of gas transmission rate with a high sensitivity
With Standard Conductance Unit developed by AIST(National Institute of Advanced Industrial Science and Technology), this system can measure the absolute amount of transmission rate with a high sensitivity.

Capable of monitoring microbial growth activity in real time.
This system measures "heat" generated from microbial cells in real time and evaluates the microbial growth activity.
Even if a sample is non-uniform including solid or liquid, the system can measure in a non-destructive manner without changing the sample's original shape.

Universal handy welder
It is suitable for spot-welding of metals like thermocouples, foil and thin plate. By local-quick welding, precise welding with less oxidation and heat deformation can be available.

Compact handy welder with safety handling
With high-temperature carbon arc, it melts wires completely to create a spherical junction.
By the use of special flux, anti-oxidation layers can be created, making a good contact point easily.