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Infrared Gold Image Furnace / RTA System
Mini Lamp Annealer with air-cooling system
MILA-700AR
アルバック販売
A desktop lamp heating device that does not use cooling water.
As the air cooling fan is used, the device can be used immediately if there is an outlet.
As the air cooling fan is used, the device can be used immediately if there is an outlet.
Features
- 50℃/s high-speed heating
- Selectable atmosphere: vacuum, gas, gas flow, air
- Precise temperature control
- Compact, table-top design
Applications
- High-speed heating of wafers, compound wafers
- Photo CVD substrate heating
- Thermal cycle tests
- Heat resistance evaluations of coating films
- Heating and drying of organic materials and resins
Specifications
| Temperature Range | RT～700℃ |
|---|---|
| Sample Size | 20mm square x 2mm thickness |
| Measurement Atmosphere | Air, Vacuum, Gas flow |
