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大容量DC电源
DC-30-44H-E
ULVAC
是30kW高阻抗规格溅射用DC电源。
特点
- 通过高速电弧中断回路实现超低电弧能量。 有助于提高生产力和产量。
- 1200 V输出，可对应高阻抗负载。
- 支持EtherCAT，有助于减少设备的布线。
用途
- FPD用溅射设备
- 半导体用溅射设备
- 触摸屏用溅射设备用
- 工业涂层用溅射设备
规格
| Model | DC-30-44H-E | |
| Input specifications | Input voltage | 3 phase AC 396 to 484V |
| Input capacity | 41.5kVA or less | |
| Output specifications | Rated power | 30kW |
| Rated current | 55A | |
| Rated voltage | -1200V | |
| Ignition voltage | -1500V | |
| Abnormal discharge control | Stop the inverter or shutoff with high-speed arc shutoff circuit when abnormal discharge is detected | |
| Control | Control method | Rated power control (P Control ) Rated current control (I Control ) Rated voltage control (V Control ) |
| Control precision | P Control：Less than ±0.5％ of the rated output or ±1％ of the set value, whichever is larger. I Control：Less than ±1％ of the rated output or ±2％ of the set value, whichever is larger. V Control：Less than ±1％ of the rated output or ±2％ of the set value, whichever is larger. |
|
| Control guarantee scope | 10 to 100％ of rated power value | |
| External interface | RS-232C or 485, EtherCAT | |
| Parallel operation | Maximum up to 12 units | |
| Cooling method | Forced air cooled | |
| Dimensions W×D×H | 483×650×177mm (excluding protrusions) | |
| Weight | 45kg | |
| Applicable standard | CE/ SEMI F47/ RoHS | |
