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Large Capacity DC Power Supply
DC-30-44H-E
ULVAC
30 kW high impedance specification DC power supply for sputtering.
Features
- Extremely low ark energy by utilizing an optional high-speed arc shutoff circuit.
It contributes to high productivity and improves manufacturing yield. - 1200V output with high-impedance load resistance.
- EtherCAT communication is available.
Applications
- Sputtering equipment for FPD
- Sputtering equipment for Semiconductor
- Sputtering device for touch panel
- Sputtering equipment for coating industrial
Specifications
| Model | DC-30-44H-E | |
| Input specifications | Input voltage | 3 phase AC 396 to 484V |
| Input capacity | 41.5kVA or less | |
| Output specifications | Rated power | 30kW |
| Rated current | 55A | |
| Rated voltage | -1200V | |
| Ignition voltage | -1500V | |
| Abnormal discharge control | Stop the inverter or shutoff with high-speed arc shutoff circuit when abnormal discharge is detected | |
| Control | Control method | Rated power control (P Control ) Rated current control (I Control ) Rated voltage control (V Control ) |
| Control precision | P Control：Less than ±0.5％ of the rated output or ±1％ of the set value, whichever is larger. I Control：Less than ±1％ of the rated output or ±2％ of the set value, whichever is larger. V Control：Less than ±1％ of the rated output or ±2％ of the set value, whichever is larger. |
|
| Control guarantee scope | 10 to 100％ of rated power value | |
| External interface | RS-232C or 485, EtherCAT | |
| Parallel operation | Maximum up to 12 units | |
| Cooling method | Forced air cooled | |
| Dimensions W×D×H | 483×650×177mm (excluding protrusions) | |
| Weight | 45kg | |
| Applicable standard | CE/ SEMI F47/ RoHS | |
