Inquiry after purchase

Rough&Middle Vacuum Pump

• Screw Type Dry Vacuum Pump
• Multi-Stage Roots Type Dry Vacuum Pump
• Scroll Type Dry Vacuum Pump
• Diaphragm Type Dry Vacuum Pump
  • Standerd Type (Single Stage)
    • Model: DAP-12S
    • Model: DAP-18S-DC24
    • Model: DA-60S
    • Model: DAT-100S
    • Model: DA-40S
    • Model: DA-81S
    • Model: DA-120S
    • Model: DA-241S
  • Standerd Type (2 Stage)
    • Model: DAP-6D
    • Model: DAP-9D-DC24
    • Model: DA-30D
    • Model: DAT-50D
    • Model: DA-20D
    • Model: DA-41D
    • Model: DA-60D
    • Model: DA-121D
  • Anti-corrsive Type
    • Model: DTC-41K
    • Model: DTC-22K
    • Model: DTC-22
    • Model: DTC-41
    • Model: DTC-60
  • High Vacuum Type
    • Model: DAU-20
  • High Vacuum and Anti-corrsive Type
    • Model: DTU-20
• Rocking Piston Type Dry Vacuum Pump
• Oil Rotary Vacuum Pump
  • Magnetic Coupling Type
    • Model: Gv200
    • Model: Gv135
    • Model: GHD-031
    • Model: GHD-101
  • High Functionality Type
    • Model: GLD-040
    • Model: GLD-137AA
    • Model: GLD-137CC
    • Model: GLD-202AA
    • Model: GLD-202BB
    • Model: GLD-280A
  • Anti-corrsive Type
    • Model: GCD-051X
    • Model: GCD-136X
    • Model: GCD-201X
  • Model:G
• Mechanical Booster Pump
• Vacuum Pumping System
• Vacuum Pump Oil
• Optional Parts
  • Anti-vibration rubber
    • Anti-vibration rubber Model:KA-20
    • Anti-vibration rubber Model:KA-25
    • Anti-vibration rubber Model:ME-10
    • Anti-vibration rubber Model:ME-12
    • Anti-vibration rubber Model:ME-12cut
    • Anti-vibration rubber Model:ME-15
    • Anti-vibration rubber Model:ME-15cut
    • Anti-vibration rubber Model:ME-20
  • Maintenance Kit
    • Maintenace Kit Model:DA-121D
    • Maintenace Kit Model:DA-15D/30S
    • Maintenace Kit Model:DA-15S
    • Maintenace Kit Model:DA-20D/40S
    • Maintenace Kit Model:Model:DA-241S
    • Maintenace Kit Model:Model:DA-30D/60S
    • Maintenace Kit Model:Model:DA-41D/41DK
    • Maintenace Kit Model:DA-60D/120S/DAH-60
    • Maintenace Kit Model:DA-81S/81SK
    • Maintenace Kit Model:DAL-181D
    • Maintenace Kit Model:DAL-361S
    • Maintenace Kit Model:DAP-15
    • Maintenace Kit Model:DAP-30
    • Maintenace Kit Model:DAP-6D/12S
    • Maintenace Kit Model:DAT-100S
    • Maintenace Kit Model:DAT-50D
    • Maintenace Kit Model:DAU-100
    • Maintenace Kit Model:DAU-20
    • Maintenace Kit Model:DOP-181S
    • Maintenace Kit Model:DOP-300S/SA/301SA/SB/SVB
    • Maintenace Kit Model:DOP-400SA/400SB
    • Maintenace Kit Model:DOP-40D
    • Maintenace Kit Model:DOP-420S
    • Maintenace Kit Model:DOP-80S
    • Maintenace Kit Model:DTC-20/21/21K
    • Maintenace Kit Model:DTC-22/22K
    • Maintenace Kit Model:DTC-40/41/41K
    • Maintenace Kit Model:DTU-60
    • Maintenace Kit Model:DTU-20
  • Rubber Vacuum Hose
    • Flange with KF flange (ISO63 X KF40)
    • Rubber Vacuum Hose(I.D.12 X O.D.30)
    • Rubber Vacuum Hose(I.D.15 X O.D.36)
    • Rubber Vacuum Hose(I.D.18 X O.D.42)
    • Rubber Vacuum Hose(I.D.25 X O.D.50)
    • Rubber Vacuum Hose(I.D.6 X O.D.18)
    • Rubber Vacuum Hose(I.D.7.5 X O.D.20)
    • Rubber Vacuum Hose(I.D.9 X O.D.24)
    • VCR Adapter SCA-1612-F
    • VCR Adapter SCA-1612-M
    • VCR Adapter SCA-1614-F
    • VCR Adapter SCA-1614-M
    • VCR Adapter SCA-1638-F
    • VCR Adapter SCA-1638-M
    • VCR Adapter SCA-2512-F
    • VCR Adapter SCA-2512-M
    • VCR Adapter SCA-2514-F
    • VCR Adapter SCA-2514-M
    • VCR Adapter SCA-2538-F
    • VCR Adapter SCA-2538-M
    • Clamp SCK-1016
    • Clamp SCK-1025
    • Clamp SCK-1040
    • Centerring SCK-2016
    • Centerring SCK-2025
    • Nozzle SCK-2040
    • Nozzle SCK-2512
    • Nozzle SCK-2518
    • KF Flange SCK-3016
    • KF Flange SCK-3025
    • Blank Flange SCK-3040
    • Blank Flange SCK-4025
    • Blank Flange SCK-4016
    • Blank Flange SCK-4040
    • Nipple SCK-5016
    • Elbow SCK-5040
    • Nipple SCK-5025
    • Elbow SCK-6016
    • Elbow SCK-6025
    • Elbow SCK-6040
    • Tee SCK-7016
    • Tee SCK-7025
    • Tee SCK-7040
    • Cross SCK-8016
    • Cross SCK-8025
    • Reducer SCK-9025
    • Reducer SCK-9040
    • Gauge port (dia.15 X KF25)
    • Gauge port (dia.15 X KF40)
    • Gauge port (dia.18 X KF40)
    • Leak port SCO-3016
    • Leak port SCO-3025
    • Flexible tube STK-016-1000
    • Flexible tube STK-016-250
    • Flexible tube STK-025-250
    • Flexible tube STK-025-1000
    • Flexible tube STK-016-500
    • Flexible tube STK-025-500
    • Flexible tube STK-040-1000
    • Flexible tube STK-040-250
    • Flexible tube STK-040-500
    • Flange with hose port pipe (VF100 X dia.30)
    • Flange with hose port pipe (VF100 X dia.27)
    • Flange with hose port pipe (VF100 X dia.38)
    • Flange with KF flange (VF100 X KF25)
    • Flange with KF flange (VF100 X KF40)
    • Flange with hose port pipe (VF25 X dia.15)
    • Flange with hose port pipe (VF25 X dia.18)
    • Flange with KF flange (VF25 X KF16)
    • Flange with KF flange (VF25 X KF25)
    • Flange with KF flange (VF40 X KF40)
    • Flange with hose port pipe (VF65 X dia.18)
    • Flange with hose port pipe (VF65 X dia.27)
    • Flange with hose port pipe (VF65 X dia.30)
    • Flange with KF flange (VF65 X KF25)
    • Flange with KF flange (VF65 X KF40)

High Vacuum Pump

• Cryo Pump
• Super Trap
• Turbo Molecular Pump
• Ion Pump
• Oil Diffusion Ejector Pump
• Vacuum Pumping System

Vacuum Gauge

• Pirani Vacuum Gauge
• Hot Cathode Gauge
• Cold Cathode Gauge
• Ceramic Capacitance Manometer
• Options & Consumables

Gas Analyzer（Process Gas Monitor）

• Sputtering Process
• Basic Process
• High Performance Process
• High Pressure Process
• Atmospheric Pressure Environmental Process
• CVD / ALD / Etching Process
• Software for Gas Analysis

Leak Detector

• Stand Alone
  • Model:HELIOT900
    • Model: HELIOT901W1
    • Model: HELIOT901D2
    • Model: HELIOT904W2
    • Model: HELIOT904D3R
    • Model: HELIOT904D4R
• Integration Type
• Calibrated Leak
• Option / Consumable parts
  • Sniffer Unit
    • Model: AS9
    • Model: BS9
    • Model: BT9

High Speed Spectroscopic Ellipsometer

• Manual Type
• Automatic Type
• Built in Type
• Option

Deposition Controller

• Deposition-Controller
• Single Sensor
• Multi Sensor
• Quartz Crystal
• Option

Vacuum Valve

• Vacuum Angle Valve
• Vacuum Gate Valve
• Pendulum Valve

Power supply for plasma generation

Vacuum-deposition electron beam source

• Electron Beam Source
  • Flat Top_EB source for metal_Model:EGN
    • Model: EGN
  • Laboratory_EB source for metal_Model:EGK
    • Model: EGK
  • EB source for metal_Model:EGL
    • Model: EGL
  • EB source for optical_Model:EGO
    • Model: EGO
  • EB source_Option
    • EBoption
• Power supply for EB source
  • Power supply for EB source_Model:HPS
    • Model: HPS

Vacuum transfer robot

• Vacuum transfer robot
  • COVOT
    • Model: COVOT
  • ELEC-RZ
    • Model: ELEC-RZ

Small Film Forming Equipment

• • Model: VPC-061
  • Model: VPC-061A
  • Model: VPC-260F
  • Model: VPC-1100
  • Model: VFR-200M/ERH
  • Model: VWR-400M/ERH
  • Model: VTR-350M/ERH
  • Model: VTS-350M/ERH
  • Model: VTR-060M/ERH
• • Model: VTR-151M/SRF
  • Model: RFS-201
• • Model: PSE
  • Bell jar cover
  • Bell jar holder
  • Adhesion shield plate
  • Metal bell jar (with water cooling tube)
  • Electrode partition
  • Substrate heating device 350℃

Cryogenic equipment

• Cryocoolers
  • Model: PDC08
  • Model: PD016
  • Model: S030
  • Model: S050
  • Model: RM10T
  • Model: RM20T
  • Model: RM50T
  • Model: RM80T
  • Model: RMS10T
  • Model: RMS50T
  • Model: RMS80T
  • Model: RMS150T
  • Model: HE05
  • Model: UHE10
  • Model: UHE15
• Cryofree Dilution Refrigerators
• Liquid Nitrogen Generators
  • Model: EMP-07A
  • Model: EMP-07W
  • Model: EMP-14A
  • Model: EMP-14W
  • Model: EMP-20W
  • Model: MP-300K
• Cryostat
• Heat Treatment And Thermal Properties