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EB Power Supply
HPS Series
HPS-1600F-DS101
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Series of power generator that support electron beam evaporation sources and feature improvements in circuit stability and performance based on technologies ULVAC have accumulated over many years and proven track record.
When used in combination with the EGC-10GS EB Gun Controller, both EG guns for optical films and EB guns for metal films can be supported.
When used in combination with the EGC-10GS EB Gun Controller, both EG guns for optical films and EB guns for metal films can be supported.
Features
- Requires no cooling water
Forced air-cooling, requires no cooling water - High reliability
Our accumulated knowledge as an equipment manufacturer has been reflected in the design - Easy to use
The LCD touch panel used for the control panel improves ease of use - Sweep waveform variations
Many beam scan forms can be created on the operating screen - High-speed arc shutoff function
Configured with a circuit that minimizes decreases in deposition rate by high-speed arc shutoff - Low level arc control function (option for optical applications) Controls minute arcs that occur in optical applications to allow stable deposition
Applications
- Vacuum evaporation for metal films
Specifications
| Model | HPS-510S | HPS-1600F -DS100 |
HPS-1600F -DS200 |
HPS-1600F -DS101 |
|
| Input specification | Input voltage | Three phase, AC190～231V | |||
| Input capacity | 7kVA | 21kVA | 22kVA | 21kVA | |
| Output specification | Rated output power | 5kW | 16kW | ||
| Voltage | -4k～-10kV | ||||
| Ripple rate | 2％p-p or less (at rated power) | ||||
| Beam current | 0～500mA | 0～1600mA | |||
| Cooling method | Forced air-cooling | ||||
| Dimensions W×D×H |
Power Supply | 480×620×300mm | 500×700×710mm | ||
| Gun Controller | 480×480×149mm | ||||
| Weight | Power Supply | 50kg | 113kg | 136kg | 113kg |
| Gun Controller | 20kg | 17kg | |||
