Electron Gun Options Available for Various Requirements
Electron Beam Source
EB source_Option
EBoption
ULVAC
For more information on ULVAC products, purchase, and/or consideration, click here.
Incidental parts selection guide
| Part Name | Model | EGN-206M/406M | EGK-3/3M | EGL-103S | EGL-35 | EGL-35M | EGL-110 | EGL-80M | EGO-1G | EGO-40M |
| High-voltage induction terminal | BERH311A | 2 | 2 | （*1） | 2 | 2 | 2 | 2 | 2 | 2 |
| Current introduction terminal | PTS-004 | 2 | 1 | （*1） | 1 | 2 | 1 | 1（*2） | 1 | 2 |
| Ground terminal | ERZ-003 | 1 | 1 | （*1） | 1 | 1 | 1 | 1 | 1 | 1 |
| Vacuum checker | DTA-002 | 1 | 1 | - | 1 | 1 | 1 | 1 | 1 | 1 |
| Water-cooled inlet terminal | DK5203-045(*3) | 4 | 2 | - | 2 | 2 | - | 2 | 2 | 2 |
| DK5203-046(*4) | - | 2 | - | - | 2 | - | - | - | - | |
| DK5203-047(*5) | - | - | - | - | - | 2 | - | - | - | |
| DK5203-048(*6) | - | - | - | - | - | - | 2 | - | - |
*1: Ultra-high vacuum is required. Please contact us separately.
*2: The current introduction terminal for the heart positioner is PTS-004, but the current introduction terminal for coil drive is 3P-16A.
*3: Vacuum side: Pipe outer diameter Φ10 / Atmospheric side: Tube outer diameter 1/2 in
*4: Vacuum side: Pipe outer diameter Φ6 / Atmospheric side: Tube outer diameter 1/4 in
*5: Vacuum side: Pipe outer diameter Φ12 / Atmospheric side: Tube outer diameter 1/2 in
*6: Vacuum side: Pipe outer diameter 1/2 in / Atmospheric side: Tube outer diameter 1/2 in
