Compact Experimental Electron Gun for Versatile Testing
Electron Beam Source
Laboratory_EB source for metal_EGK series
Model:EGK
ULVAC
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The EGK-3 electron beam evaporation source is the result of ULVAC's many years of technology accumulation and track record to improve performance and reliability.
This evaporation source has a hearth with a maximum input power of 5 kW.
The crucible capacity is 2.6cc, making it suitable for experiments and small-scale production.
This evaporation source has a hearth with a maximum input power of 5 kW.
The crucible capacity is 2.6cc, making it suitable for experiments and small-scale production.
Features
- The adoption of a 2.6cc hearth makes it suitable for small-scale production.
- Since the electron beam is deflected by an electromagnetic field, the effect of secondary electrons on the deposited body is extremely small.
- Even with sublimable materials, the partial burrowing phenomenon can be eliminated by scanning the beam spot in the X and Y axis directions, and the entire crucible can be evaporated smoothly. (Japan Country Patent 831485, No. 843447)
- The electron beam is deflected by 225°, so it is not exposed to vapors from the evaporated material, and the filament has a long service life.
- The emitter assembly is easy to attach and detach, making it easy to replace filaments, insulators, etc.
Specifications
| Model | EGK-3 | EGK-3M | |
| Electron beam deflection angle | 225° | ||
| Number of crucibles | 1 | 4 | |
| Crucible capacity | 2.6cc | 2.9cc | |
| Crucible Dimensions: Top × Bottom× Depth | 21Φ×15.6Φ×10H（mm） | 21Φ×17.5Φ×10H（mm） | |
| Cooling water | Hearth | 8L/min or more | |
| other | 1L/min or more | ||
| DimensionsDimensions(W×D×H) does not contain protrusions | 110×207×126（mm） | 140×207×126（mm） | |
| weight | Approx. 4kg | Approx. 5kg | |
| Deposition rate | 0.5μm/min or more (Al / 5kW / 250H directly above the hearth) |
0.6μm/min or more (Al / 5kW / 250H directly above the hearth) |
|
| Maximum accelerating voltage | -10kV | ||
| Maximum Emission Current | 0.5A | ||
| Applicable power supply | HPS-510S | ||
