Versatile Electron Gun for Metal Film Production with a Proven Track Record
Electron Beam Source
EB source for metal_EGL series
Model:EGL
ULVAC
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The "Model:EGL" of electron beam evaporation sources are the result of ULVAC's many years of technology accumulation and track record to improve performance and reliability. The "Model:EGL" has a lineup of various types of guns, and can be used for arbitrary multilayer film deposition, high-speed deposition of thick films, and experiments in ultra-high vacuum.
Features
- Since the electron beam is deflected by an electromagnetic field, the effect of secondary electrons on the deposited body is extremely small.
- Even sublimable materials can be evaporated smoothly by scanning the beam spot on the X and Y axes, eliminating the phenomenon of burrowing. (Japan Country Patent 831485, No. 843447)
- The electron beam is 270° deflected, so it is not exposed to vapors from the evaporated material, and the filament has a long service life.
- The emitter assembly is easy to attach and detach, making it easy to replace filaments, insulators, etc.
Specifications
| Model | EGL-103S | EGL-35 | EGL-35M | EGL-110 | EGL-80M | |
| Electron beam deflection angle | 270° | |||||
| Number of crucibles | 3 | 1 | 4 | 1 | 4 | |
| Crucible capacity | 10cc | 40cc | 40cc ×2/10cc×2 | 110cc | ||
| Crucible Dimensions: Top × Bottom× Depth | 35Φ×31Φ×11H | 50Φ×41Φ×25H | 50Φ×41Φ×25H/32Φ×24Φ×15H | 75Φ×59Φ×32H | 75Φ×57Φ×32H | |
| Cooling water | Volume Crucible | 10L/min or more | 19L/min or more | 20L/min or more | ||
| coil | 2L/min or more | - | 2L/min or more | ー | 4L/min or more | |
| Dimensions W×D×H | 313 ×250×108 mm | 160×206×79 mm | 170×240×156 mm | 136×220×90 mm | 265×318×168 mm | |
| weight | 16kg | 10kg | 18kg | 15kg | 30kg | |
| Deposition rate | - | 1.8μm/min or more （Al/8kW/250H directly above the hearth) |
1.6μm/min or more （Al/8kW/250H directly above the hearth) |
4.5μm/min or more （Al/16kW/250H directly above the hearth) |
4μm/min or more （A| 16kW,/250H directly above the hearth) |
|
| Maximum accelerating voltage | -10kV | |||||
| Maximum Emission Current | 0.6A | 1.0A | 1.6A | |||
| Applicable power supply | HPS-1000N-100/HPS-1000N-200 | HPS-1600F-DS100/ HPS-1600F-DS200 |
HPS-1600F-DS101 | |||
