Flat-Top Electron Gun with an Advanced Secondary Electron Absorption Mechanism
Electron Beam Source
Flat Top_EB source for metal_EGN series
Model:EGN
ULVAC
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The "Model:EGN" is a metal vapor deposition electron beam evaporation source newly developed with a focus on improving maintainability.
The use of a flat-top structure reduces the area of adhesion to the electron beam evaporation source, achieving high maintainability.
The use of a flat-top structure reduces the area of adhesion to the electron beam evaporation source, achieving high maintainability.
Features
- It suppresses backscattered electrons and suppresses the rise in substrate temperature.
- Flat-top structure reduces the area of deposition on the electron beam evaporation source, making it easy to clean.
- The new emitter structure reduces the number of parts to 60% compared to the previous model, making assembly easier.
- Ribbon beams for metal deposition and spot beams for oxides/compounds can be selected.
- Feedback of know-how accumulated as an equipment manufacturer to design.
Specifications
| Model | EGN-206M | EGN-406M | |
| Electron beam deflection angle | 270° | ||
| Number of crucibles | 6 | ||
| Crucible capacity | 20cc | 40cc | |
| Crucible Dimensions: Top × Bottom× Depth | Φ42×Φ32×19（mm） | Φ50×Φ41×25（mm） | |
| Cooling water | Hearth | 10L/min or more | |
| other | 2L/min or more | ||
| DimensionsDimensions(W×D×H) does not contain protrusions |
214×343×144（mm） | ||
| weight | 28kg or less | ||
| Deposition rate | 1.6μm/min (Ribbon beam / Al / 8kW / 40cc crucible / 250H directly above the hearth) |
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| Maximum accelerating voltage | -10kV | ||
| Maximum Emission Current | 0.8A | 1.0A | |
| Applicable power supply | HPS-1000N-100/HPS-1000N-200 | ||
