Power Supply for Electron Guns Supporting a Wide Range of Deposition Processes
Power supply for EB source
Power supply for EB source_HPS series
Model:HPS
ULVAC
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Based on ULVAC's many years of technology accumulation and achievements, this power supply is compatible with electron beam evaporation sources that stabilizes circuits and improves performance.
When used in combination with the EGC-10GS EB gun controller, it can be used for both optical thin film EB guns and metal thin film EB guns.
When used in combination with the EGC-10GS EB gun controller, it can be used for both optical thin film EB guns and metal thin film EB guns.
Features
- No cooling water required
Forced air cooling system eliminates the need for cooling water. - High Reliability
Feedback of know-how accumulated as an equipment manufacturer to design. - Ease of use
The use of an LCD touch panel for the operation panel improves operability. - Sweep waveform variations
Many beam scan forms can be created on the operating screen※ - High-speed arc shut-off function
High-speed arc interruption minimizes deposition rate degradation.
※Excludes HPS-510S
Specifications
| Model | HPS-510S | HPS-1000N-100 | HPS-1000N-200 | HPS-1000N-G100 | HPS-1000N-G200 | |
| Input Specifications | Input Voltage | 3φ AC190～231V | ||||
| Input Capacitance | 7kVA | 14kVA | 15kVA | 14kVA | 15kVA | |
| Output Specifications | Rated Power | 5kW | 10kW | |||
| Voltage range | -4k～-10kV | |||||
| Ripple rate | Less than ±2% of rated output | |||||
| Beam current | 0～500mA | 0～1000mA | ||||
| Cooling method | Forced air cooling | |||||
| Dimensions （W×D×H）(power supply body) does not contain protrusions | 480×620×300（mm） | 494×701×712（mm） | ||||
| Dimensions （W×D×H） (Gun Controller) does not contain protrusions | ー | 480.5×499×143（mm） | ||||
| Weight (power supply body) | 45kg | 120kg | 133kg | 120kg | 133kg | |
| Weight (Gun Controller) | - | 11.5kg | ||||
| Standard | - | CE | ||||
| Model | HPS-1600F-DS100 | HPS-1600F-DS200 | HPS-1600F-DS101 | |
| Input Specifications | Input Voltage | 3φ AC190～231V | ||
| Input Capacitance | 21kVA | 22kVA | 21kVA | |
| Output Specifications | Rated Power | 16kW | ||
| Voltage range | -4k～-10kV | |||
| Ripple rate | Less than ±2% of rated output | |||
| Beam current | 0～1.6A | |||
| Cooling method | Forced air cooling | |||
| Dimensions W×D×H (power supply body) | 500×700×710（mm） | |||
| Dimensions W×D×H (Gun Controller) | 480.5×499×143（mm） | |||
| Weight (power supply body) | 113kg | 120kg | 113kg | |
| Weight (Gun Controller) | 11.5kg | 12kg | ||
| Standard | - | - | - | |
