Introduction of vacuum equipments manufactured by ULVAC Group.
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High-speed spectroscopic ellipsometers measure thin film thickness and optical constants (refractive index, extinction coefficient) with high precision and without contact.
Type
Manual Type
Portable models that can be carried anywhere and 150mm manual stage models are available.
Manual Type
Model:UNECSｰPortable
"Model:UNECS" is a kind of spectroscopic ellipsometers to measure the refractive index and thickness of the thin film quickly and accurately. It adopts an unique measurement method, and realizes the compact size and high-speed measurement .
UNECS-Portable measurement unit weight is only 2.2kg. It is easy to be carried for vacuum equipments site acceptance test and can measure large size samples by detaching its sample stage and putting it directly on samples.
Manual Type
Model:UNECS-1500M
"Model:UNECS" is a kind of spectroscopic ellipsometers to measure the refractive index and thickness of the thin film quickly and accurately. It adopts an unique measurement method, and realizes the compact size and high-speed measurement .
UNECS-1500M is easy to locate measurement points by the easy-to-use manual R-θ stage.
Automatic Type
Automatic stage model that is compatible with 150mm/200mm/300mm substrates. Automatic mapping measurement allows for a color map display of film thickness distribution.
Automatic Type
Model:UNECS-1500A
"Model:UNECS" is a kind of spectroscopic ellipsometers to measure the refractive index and thickness of the thin film quickly and accurately. It adopts an unique measurement method, and realizes the compact size and high-speed measurement .
3 models are available for Φ150, 200 and 300mm samples. Auto mapping R-θ stage and auto focus function make it possible to measure film thickness of entire sample surface and dispay film thickness distribution by color map.
Automatic Type
Model:UNECS-2000A
"Model:UNECS" is a kind of spectroscopic ellipsometers to measure the refractive index and thickness of the thin film quickly and accurately. It adopts an unique measurement method, and realizes the compact size and high-speed measurement .
3 models are available for Φ150, 200 and 300mm samples. Auto mapping R-θ stage and auto focus function make it possible to measure film thickness of entire sample surface and dispay film thickness distribution by color map.
Automatic Type
Model:UNECS-3000A
"Model:UNECS" is a kind of spectroscopic ellipsometers to measure the refractive index and thickness of the thin film quickly and accurately. It adopts an unique measurement method, and realizes the compact size and high-speed measurement .
3 models are available for Φ150, 200 and 300mm samples. Auto mapping R-θ stage and auto focus function make it possible to measure film thickness of entire sample surface and dispay film thickness distribution by color map.
Built in Type
Built-in model with a compact, lightweight sensor unit that can be easily incorporated into inspection equipment.
Built in Type
Model:UNECS-1M
"Model:UNECS" is a kind of spectroscopic ellipsometers to measure the refractive index and thickness of the thin film quickly and accurately. It adopts an unique measurement method, and realizes the compact size and high-speed measurement .
UNECS-1M, the light weight and compact design sensor head, is capable to be integrated into various equipments.
Option
Film Thickness Standards SiO2/Si_100nm
