High Speed Spectroscopic Ellipsometer
Type
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- Select condition
- Manual Type
- Automatic Type
- Built in Type
- Option
Sample Stage Size(㎜)
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Products
- Rough&Middle Vacuum Pump
- High Vacuum Pump
- Vacuum Gauge
- Gas Analyzer（Process Gas Monitor）
- Leak Detector
- High Speed Spectroscopic Ellipsometer
- Deposition Controller
- Vacuum Valve
- Power supply for plasma generation
- Vacuum-deposition electron beam source
- Vacuum transfer robot
- Small Film Forming Equipment
- Refrigerator (CRYO)
- Heat Treatment And Thermal Properties