Switch Unit for Switching Between Different Power Sources
RF Power System
RF power supply_Option
Model:EXN
ULVAC
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The "Model:EXN" is a target switcher that can be used to switch the power supply destination for multiple DC sputtering electrodes and RF sputtering electrodes, or to switch the output of multiple DC power supplies or RF power supplies to a single electrode
Features
- It is possible to switch the output of the matching box.
- Since there is no need to install a matching box for each cathode, it greatly contributes to the reduction of equipment costs.
- Two types of switching methods are available: manual and motor-driven. We have also prepared a water cooling system that can handle higher power.
- It can also be used as a switching device for DC power supply and DC pulse power output.
- Since there is only one matching box, loads that exceed the matching range cannot be used with each other.
Specifications
| Specification | Air-cooled target switcher Specifications | |||||
| EXN2T-40A | EXN3T-40A | EXN4T-40A | EXN2M-40A | EXN3M-40A | EXN4M-40A | |
| Number of switching contacts | 2Point | 3Point | 4Point | 2Point | 3Point | 4Point |
| Frequency used | DC-13.56MHz | |||||
| Rated current- carrying current |
40A | |||||
| Switching method | manual | electric | ||||
| Cooling method | Natural air cooling | |||||
| Specification | Water-Cooled Target Switcher Specifications | |||||
| EXN2T-70W | EXN3T-70W | EXN4T-70W | EXN2M-70W | EXN3M-70W | EXN4M-70W | |
| Number of switching contacts | 2Point | 3Point | 4Point | 2Point | 3Point | 4Point |
| Frequency used | DC-13.56MHz | |||||
| Rated cuurrent- carrying current |
70A | |||||
| Switching method | manual | electric | ||||
| Cooling method |
Water-cooled | |||||
