Synchronization Unit to Solve Discharge Interference Issues
RF Power System
RF power supply_Option
Model:EXO-13
ULVAC
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This unit is designed as an external oscillator source for high-frequency power supplies. It is capable of outputting a rated signal at a single frequency of 13.56 MHz.
In addition, this unit is equipped with 1~4 BNC output ports, which can perform high-frequency oscillation in the same phase for up to 4 power supplies.
* The external input terminal of the connected power supply must be terminated to 50 Ω and must be able to operate at a distance of 10 mW to 100 mW.
Features
- Up to four RF power supplies can be synchronized in phase.
- By eliminating the phase tuft function, low cost has been achieved.
Specification
| Model | EXO-13 | |
| Input Specifications | Input voltage | Single Phase AC100V |
| Input Capacitance | 1VA or less | |
| Output Specifications | Oscillation frequency | 13.56MHz±0.05% |
| DimensionsDimensions(W×D×H) does not contain protrusions | 145×110×44 （mm） | |
