Matching Box Switching Unit for Utilizing RF Power Output with Various Loads
RF Power System
RF power supply_Option
Model:MEX-N
ULVAC
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This is a switching machine for matching boxes for power supplies for plasma generation such as RF sputtering, plasma CVD, etching, etc.
Features
- It is possible to switch between multiple matching boxes.
- It can be used when it is not discharged at the same time, and contributes to reducing the cost of the equipment by reducing the number of power supplies installed in the device.
- Since one matching box is used for one cathode, it is possible to select a variety of cathodes with different impedances.
Specifications
| Capacity range | Number of matching boxes switched | ||||||
| ２ Unit | ３ Unit | ４ Unit | ５ Unit | ６ Unit | ７ Unit | ８ Unit | |
| 500, 1kW | MEX-2N-1k | MEX-3N-1k | MEX-4N-1k | MEX-5N-1k | MEX-6N-1k | MEX-7N-1k | MEX-8N-1k |
| 3kW | MEX-2N-3k | MEX-3N-3k | MEX-4N-3k | MEX-5N-3k | MEX-6N-3k | MEX-7N-3k | MEX-8N-3k |
| 5kW | MEX-2N-5k | MEX-3N-5k | MEX-4N-5k | - | - | - | - |
