Highly Versatile RF Power Supply System
RF Generator
RF power supply_Model:RFS-N
Model: RFS-N
ULVAC
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The "Model:RFS-N" is a 13.56MHz, 0.5kW/1/kW/3kW/5kW output RF power supply for plasma processing. Equipped with a high-efficiency RF amplifier, it is compact and lightweight.
In addition, the RF power supply has a built-in auto-matching controller function, so it is possible to control the power of the RF power supply and the matching system with only the main unit.
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RFS-1305N/RFS-1310N
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RFS-1330N/RFS-1350N
Features
- Energy-saving is achieved by installing an RF circuit with high power conversion efficiency.
- High-speed auto-matching is performed by high-speed algorithm
- Built-in auto-matching function in RF power supply
- External analog control and serial communication control are possible.
- Achieving overwhelming reliability by designing based on the know-how accumulated over many years as an equipment manufacturer.
Specifications
| RF Power Supply Model | RFS-1305N | RFS-1310N | RFS-1330N | RFS-1350N | |
| Input Specifications | Input Rated Voltage | Single-phase AC200V ｰ 220V | Three phase AC200V ｰ 220V | ||
| Input Capacitance | 1.2 kVA or less | 1.8 kVA or less | 5 kVA or less | 8 kVA or less | |
| Output Specifications | Oscillation frequency | 13.56MHz | |||
| Rated Power | 500W（At 50Ω load） | 1000W（At 50Ω load） | 3000W（At 50Ω load） | 5000W（At 50Ω load） | |
| Output connection | N type | HN type | DIN 7/16 | ||
| Cooling method | Forced air cooling | Forced air cooling+Water-cooling | |||
| No cooling water required | Flow rate 4L/min | Flow rate 6L/min | |||
| DimensionsDimensions(W×D×H) does not contain protrusions | 240 x 495 x 150（mm） | 480 × 500 × 150（mm） | |||
| Weight | Approx.11kg | Approx.23kg | |||
| Standard | CE, KC, SEMI F47, SEMI S2, RoHS | ||||
| Matching Box Model | MBX-1305N | MBX-1310N | MBX-1330N | MBX-1350N |
| Input power | 30 - 500W | 30 - 1000W | 30 - 3000W | 50 - 5000W |
| Allowable output current | 30Arms | 80Arms | 120Arms | |
| Allowable output voltage | 2500Vpp | 5000Vpp | 10000Vpp | |
| Cooling method | Forced air cooling | Water cooling (2L/min) | ||
|
DimensionsDimensions(W×D×H) does not contain protrusions |
375 ×250 ×120(mm) | 375 × 250 ×170(mm) | 450 × 500 × 248(mm) | |
| Weight | Approx.8kg | Approx.10kg | Approx.21kg | |
| Standard | CE, KC, SEMI F47, SEMI S2, RoHS | |||
