All RF Power Functions in a Single Unit
RF Power System
Built-in matcher_RF power supply_RMG
Model:RMG-1303
ULVAC
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The RMG-1303 is a 13.56MHz, 300W RF power supply with built-in output matcher for plasma processes such as RF sputtering and plasma CVD etching. The integration of the matcher and the RF power supply makes it smaller and lighter. It can be controlled from low output, and can be used in a wide range of fields, from R&D applications to mass production equipment.
Features
- Controllable from power as low as 1W
- 500Hz~100kHz pulse RF output function as standard Capable of control with low output power
- Equipped with an external synchronization pin as standard
- Single-phase 100V~220V / 50Hz~60Hz wide range of inputs
- 200mm×200mm×350mm/10kg, compact and lightweight power supply
- CE、KC、SEMI F47、SEMI S2、RoHS
Specifications
| Model | RMG-1303 | |
| Power supply function section | Input voltage | Single-phase AC100-220V |
| Input Capacity | 700VA or less | |
| Frequency | 13.56MHz±0.01% | |
| Forword power | 300W (At 50Ω load) | |
| Matching function section | Rated power | 300W |
| Rated current | 10Arms | |
| Rated voltage | 2500Vpp/-2500Vdc(Standard) *1 | |
| Output Electrodes/Options | 2-M4(standard)/N,HN,DIN7/16 *2 | |
| Common section | Cooling method | Forced air cooling |
| DimensionsDimensions (W×D×H) does not contain protrusions |
200×350×200（mm） | |
| Weight | Approx.10kg | |
| Standard | CE、KC、SEMI F47、SEMI S2、RoHS（Europe） | |
*2 It is possible to change to the connector output type as an option.
