Optimal for process management of evaporation equipment and vacuum furnaces
Basic Process Model: BGM2-101 / 102
ULVAC
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"Qulee" (pronounced as "KLEE"), is ULVAC's latest model for residual gas analysis. Feedback from
facility engineers in various production lines are incorporated in the new product design offering
utmost simplicity.(Ethernet compatible)
facility engineers in various production lines are incorporated in the new product design offering
utmost simplicity.(Ethernet compatible)
Features
- Excellent in Cost Performance
Suitable for RGA application - Communication interface
Ethernet compatible - Integrated Display
No need for PC - Simple Operation
"One Click" function - Bake Out
Max 120℃ (248°F ) high temperature bake (250℃ (482°F ) when sensors are removed) - Degas Function
Electron bombard degas - Protection and Maintenance Features
Ion source and secondary electron multiplier protection maintenance help function - Various Leak Tests are Available
Helium leak test, air leak test, leak up - Total Pressure Measurement
Capable of total pressure measurement - Qulee QCS is Included
This software is included and compatible with (Windows 8/10/11) - Applicable Standard
Conforms with CE
Applications
- Residual gas analysis for organic electro luminescence
- Residual gas monitoring for PV, FPD, and semiconductor manufacturing system
- Residual gas analysis in PVD system and vacuum deposition
- Residual gas analysis for high vacuum pumping equipment, etc.
- Residual gas analysis for freeze drying system
- Various types of gas analysis for research and development
Specifications
Resolution M/△M=1M(10% P.H.)
| Model | BGM2-101 | BGM2-201 | BGM2-102 | BGM2-202 |
| Mass filter type | Quadrupole | |||
| Mass range | 1～100 amu | 1～200 amu | 1～100 amu | 1～200 amu |
| Detector type | Faraday cup | EM tube Faraday cup |
||
| Sensitivity | 10-7A / Pa | 4A / Pa | ||
| 1.3×10-5A / Torr | 533A / Torr | |||
| 7.5×10-6A / mbar | 400A / mbar | |||
| Minimum detectable partial pressure | Approx.10-8Pa | Approx.10-12Pa | ||
| Approx.7.5.10-11Torr | Approx.10-15Torr | |||
| Approx.1×10-10mbar | Approx.1×10-14mbar | |||
| Maximum operating pressure | 1x10-2Pa | |||
| Total pressure function | 7.5×10-5 Torr | |||
| 1.3×10-4mbar | ||||
| One Click function | Capable / He / H2O / N2 / O2 / Any gas | |||
| One Click leak test function |
Capable | |||
| Power input | DC24V±10％ 50W | |||
| Maximum sensor operating temperature |
120℃ (248°F ) | |||
| Maximum bakeout temperature (electronics removed) |
250℃ (482 °F ) | |||
| Operating temperature range | 10 to 40℃ (50 to 104 °F) | |||
| Software | Qulee QCS Ver. 4.2 later (Windows 8/10/11) | |||
| Applicable standard | CE | |||
