Model:HGM2-202｜High Performance Process｜Gas Analyzer（Process Gas Monitor）｜Products

Optimal for gas analysis in research and development (mass range 1-200 amu)

High Performance Process

Model:HGM2-202

ULVAC

ULVAC's new "Model:Qulee HGM2" residual gas analyzer with revolutionary simplicity of use.
Offers highest sensitivity of all models at 2.5 × 10 ^-6A/Pa, Qulee HGM2.
Can meet the needs of various R&D and other vacuum system proce ss monitoring.(Ethernet compatible)

Features

Most Appropriate for R&D Applications
Offers highest sensitivity 2.5×10^-6A/Pa (3.3×10^-4A/Torr, 2.5×10^-4A/mbar）
Communication interface Ethernet compatible
Integrated Display No need for PC
Simple Operation "One Click" function
Bake Out
Max 250℃ (482°F) high temperature bake (300℃ (572°F) when the sensors are removed)
Degas Function　Electron bombard degas
Maintenance
Filament, ion source, and secondary electron multiplier are easy to replace
Protection and Maintenance Features
Unit offers protection and maintenance of ion source and secondary electron multiplier Traceability of analysis tube (Japanese Patent No. 5016031)
Various Leak Tests are Available
Helium leak test, air leak test, leak up
Total Pressure Measurement
Capable of total pressure measurement (ionization gauge)
Qulee QCS is Included
This software is included and compatible with (Windows 8/10/11)
Applicable Standard　Conforms with CE

Applications

R&D such as thermal desorption gas analysis
Residual gas analysis for ultra-high vacuum pumping equipment, etc
Trace impurities in gas
R&D for photovoltaic field
Analysis of organic compound
Environmental measurements

Specifications

Model	HGM2-202		HGM2-302
Mass filter type	Quadrupole
Mass range	1 ~ 200 amu		1 ~ 300 amu
Resolution	M/ ΔM=1M(10% P.H.)
Detector type	Faraday cup	SEM	Faraday cup	SEM
Sensitivity	2.5×10^-6 A/Pa @1.0A/Pa	4 A/Pa	2.0×10^-6 A/Pa @1.0A/Pa	4 A/Pa
	3.3×10^-4 A/Torr	533 A/Torr	3.3×10^-4 A/Torr	533 A/Torr
	2.5×10^-4 A/mbar	400 A/mbar	2.5×10^-4 A/mbar	400 A/mbar
Minimum datectable partial pressure	Approx. 10^-9Pa	Approx. 10^-13Pa	Approx. 10^-9Pa	Approx. 10^-13Pa
	Approx. 7.5×10^-12 Torr	Approx. 7.5×10^-16 Torr	Approx. 7.5×10^-12 Torr	Approx. 7.5×10^-16 Torr
	Approx. 1×10^-11 mbar	Approx. 1×10^-15 mbar	Approx. 1×10^-11 mbar	Approx. 1×10^-15 mbar
Maximum operating pressure	1×10^-2Pa
	7.5×10^-3 Torr
	1×10^-4 mbar
Filament	lr / Y₂O₃, 2pcs
Ionizing voltage	25 ~ 70 eV(defalut:70eV)
Emission current	0.1mA/0.5mA/1.0mA(default:0.5mA)
DEGAS	Electron bombard type 330V, 5mA
Total pressure function	Capable / 10^-2 ~ 10^-5Pa
"One Click" function	Capable / He / H₂O / N₂/ O₂/ Any gas
"One Click" leak test function	Capable
Power input	DC24V±10% 50W
Weight(sensor unit / sensor)	2.4kg/0.81kg
Maximum sensor operating temperature	250℃(482°F)
Maximum bakeout temperature (elsectronisc removed)	300℃(572°F)
Operating temperature range	10 to 40℃(50 to 104°F)
Operating humigity range	15 ~ 80%(not condensing)
IP rating	IP30(sensor unit)
Power connector	MSTBV2.5/3-STF-5.08
Communication interface	Ethernet compatible
External input / output connector	D-sub15-pin (M2.6 screw)(eith option)
Communication connector	RJ45
External input / output signal	Analog input (0 to 10V)×2,External interlock input (pressure protection)×1,Error output ×1(FIL,SEM,RF,fault),Partial pressure setpoint output ×2(fault,alarm),Total pressure setpoint output ×1
Software	Qulee QCS Ver. 4.2 later (Windows 8/10/11)
Standard accessories	Power connector, LAN cable (3m long),Software (install CD),Instruction manual (CD)
Option accessories (cf. Qulee optional catalogue)	LAN cable (10,15,20,30,50m long), AC power adapter, USB-LAN adapter, Switing hub(8ports or 16ports), Input / output connector, Jacket heater, Carry case
Applicable standard	CE

※Please prepare an AC/DC power supply or please purchase the AC/DC adapter of an option.