Cryocoolers
RM20T
アルバック・クライオ
It is installed to a cryopump and can condense or adsorb all gas molecules.
Specifications
R Series (two-stage type) |
RM20 | |
Refrigerator system | CRM20 | |
Refrigeration capacity | 1st stage | 35W/77K |
2nd stage | 12W/20K | |
Ultimate temperature | 12K | |
Cooldown time | 30min | |
Weight (Refrigerator unit) |
14kg | |
Maintenance Interval | 16,000 hours |
※Cooling capacity, ultimate temperature, cooldown time are at a combination of one refrigerator and one compressor, ambient temperature of 24℃ and no load.
※Value at the power supply frequency of 60Hz.