Cryocoolers
RM80T
アルバック・クライオ
It is installed to a cryopump and can condense or adsorb all gas molecules.
Specifications
R Series (two-stage type) |
RM80T | |
Refrigerator system | CRM80T | |
Refrigeration capacity | 1st stage | 100W/77K |
2nd stage | 8W/20K | |
Ultimate temperature | 12K | |
Cooldown time | 35min | |
Weight (Refrigerator unit) |
16kg | |
Maintenance Interval | 16,000 hours |
※Cooling capacity, ultimate temperature, cooldown time are at a combination of one refrigerator and one compressor, ambient temperature of 24℃ and no load.
※Value at the power supply frequency of 60Hz.