EXN4M-70W|EXN Series|RF Power Supply Option|RF Power Supply|Products|ULVAC SHOWCASE

RF Power Supply Option

EXN Series

EXN4M-70W

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EXN series is a target switcher. It is used to switch power supply destinations to multiple DC sputtering electrodes and RF sputtering electrodes. It also can switch the output of multiple DC and RF power supplies and supply them to one electrode.


Features

  • Possible to switch the output of the matching box.
  • Since it is not necessary to install a matching box for each cathode, it greatly contributes to equipment cost reduction.
  • Two types of switching methods are available: manual and motor drive. A water-cooled system that can handle higher power also available.
  • Also can be used as a switch for DC power supply and DC pulse power output.
  • Since there is only one matching box, loads that exceed the matching range cannot be used together.

Specifications

Specification Water-cooled target switching device specifications
EXN2T-70W EXN3T-70W EXN4T-70W EXN2M-70W EXN3M-70W EXN4M-70W
Switching contact point 2 points 3 points 4 points 2 points 3 points 4 points
Hot switch Not available
Frequency used DC-13.56MHz
Rated current 70A
Withstand voltage Between contact AC 10kV for 1 minute (50/60Hz)
Between contact -GND AC 10kV for 1minute (50/60Hz)
Switching method Manual type Motorized
Motor rated voltage DC24V
Motor rated current 0.22A (0.75Amax)
Contact position output Microswitch (Contact capacity 0.25A 24VDC)
Cooling method Water cooling
Cooling flow rate 5L/min
Pressure resistance 0.5MPa
Joint Joint 3/8 inch N2 tube joint
High frequency connection terminal O4mm bolted
Installation temperature 5℃~35℃
Installation area humidity 30%~80% (However, no condensation)

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