Sputtering System RFS-201
ULVAC
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Small-sized high-frequency sputtering device with an RF power supply.
Ideal for basic research and development experiments because of the deposition capabilities for metals, semiconductors and insulators.
Features
- It is sputtering system of an insulator, metal, and a semiconducting material.
- Oil diffusion pump is used for main pumping.
- Single deposition is available by dia.80 mm, 1 cathode.
- Sputtering speed 20nm/min. (SiO2) is available by conventional sputtering.
Specification
| Model | RFS-201 | |
| Vacuum performance | Ultimate pressure | 6.6×10-４Pa |
| Evacuation time | 6.6×10-３Pa/5min | |
| Vacuum chamber | Vacuum chamber | Metal chamber （200mm(W)×250mm(D)×150mm(H)) |
| Cathode | Φ80mm、1way | |
| Standard target | Φ80mm×t1-5mm | |
| Effective area of sputtering | 50mm | |
| Sputtering speed | SiO2 SiO2, more than 20nm/min at deposition | |
| Film thickness distribution | SiO2 SiO2, within ±8% at dia.50mm | |
| Substrate heating temperature | Max 350℃ | |
| Max 350 degrees C | 30～50mm(Variable） | |
| Exhaust system | Main pump | Oil diffusion pump（Water cooling） 150L/sec |
| Liquid Nitrogen trap | Option | |
| Sub pump | Oil rotary pump100L/min | |
| Oil mist trap | Oil mist trap OMT-100A | |
| Operation system | Main valve | Clapper valve |
| Sub valve | Three way valve | |
| Automatic leak valve | Option | |
| Control | Manual control | |
| Control system | RF power supply | Max 300W (0～300Ｗ Variable） |
| Pirani vacuum gauge | G-TRAN | |
| Ionization vacuum gauge | Option | |
| Setup | Extreial dimensions | 764mm（W）×723mm（D）×1648mm（H） |
| Weight | 260kg | |
Utility
| Model | RFS-201 |
| Power required | 200V Single phase 50/60Hz 2.8kVA |
| Ground terminal | A grade (ground resistance/10Ω or less) |
| Water requirement | 5.0 L／min (Water temperature : less than 25 degrees C, Water pressure : 200 ? 300kPa (gauge pressure)) |
| Connection (power supply) | Vinyl cabtyre cable (with R2-5 ring tongue terminals) 4m |
| Connection (ground) | Earth cable (sheet copper) 4m |
| Connection (water piping) | Tetoron Braided hose (O.D.dia.15mm × I.D.dia.9mm) 4m (2 lines) |
Dimension drawing
Feedthrough Collar
Basic composition
| [1] | Chamber |
| [2] | Taeret electrode |
| [3] | Substrate electrode |
| [4] | Shutter |
| [5] | Current guide terminal |
| [6] | Thermocouple introduction terminal |
| [7] | Gauge port |
| [8] | Sample holder |
| [9] | Backing plate |
| [10] | Target |
| [11] | Service port |
| [12] | Front door |
Sample holder drawing
[The standard type]
※We customize according to the purpose of research and development.
Optional parts
| ●Liquid Nitrogen trap | ●Ionization vacuum gauge |
| ●Magnetron | ●In line trap (OMI-100) |
| ●Turbo molecular pump | ●DC power supply |
| ●Introduction gas (2,3 lines) | ●Automatic leak valve for oil rotary pump |
