Sputtering System VTR-151M/SRF
ULVAC
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Small-sized high-frequency sputtering device with an RF power supply.
Ideal for basic research and development experiments because of the deposition capabilities for metals, semiconductors and insulators.
Features
- It is sputtering system of an insulator, metal, and a semiconducting material.
- Turbo molecular pump is used for main pumping.
- Multiple deposition is available by dia.2 inch, 3 cathodes.
- Sputtering speed 30nm/min (SiO2) is available by magnetron sputtering.
- It has Substrate heating system (350degrees C).
Specification
| Model | VTR-151M/SRF (SCOTT-C3) | |
| Vacuum performance | Ultimate pressure | 6.6×10-４Pa |
| Evacuation time | 6.6×10-３Pa/5min | |
| Vacuum chamber | Vacuum chamber | Metal chamber （dia.310.5mm × 160mm (H)) |
| Cathode | dia.2inch, 3ways | |
| Standard target | dia.2inch (dia.50.8mm) × t1mm ×t1mm | |
| Effective area of sputtering | 25mm | |
| Sputtering speed | SiO2 SiO2, more than 30nm/min at deposition | |
| Film thickness distribution | SiO2 SiO2, within ±10% at dia.25mm | |
| Substrate heating temperature | Max 350℃ | |
| Max 350 degrees C | 50mm ～ 90mm （Variable：Half fixed） | |
| Exhaust system | Main pump | Turbo molecular pump 250L/sec |
| Liquid Nitrogen trap | ー | |
| Sub pump | Oil rotary pump200L/min | |
| Oil mist trap | Oil mist trap OMT-200A | |
| Operation system | Main valve | Butterfly valve |
| Sub valve | Three way valve | |
| Automatic leak valve | Option | |
| Control | Manual control | |
| Control system | RF power supply | Max 300W (0～300ＷVariable） |
| Pirani vacuum gauge | GP-1GRY | |
| Ionization vacuum gauge | ISG1/SH2-1 | |
| Setup | Extreial dimensions | 1081mm（W）×853mm（D）×1104mm（H） |
| Weight | 400kg | |
Utility
| Model | VTR-151M/SRF (SCOTT-C3) |
| Power required | 200V Single phase 50/60Hz 3.5kVA |
| Ground terminal | A grade (ground resistance/10Ω or less) |
| Water requirement | 2.0 L／min (Water temperature : less than 25 degrees C, Water pressure : 200kPa(gauge pressure)) |
| Connection (power supply) | Vinyl cabtyre cable (with R3.5-5 ring tongue terminals) 4m |
| Connection (ground) | Earth cable(with R5.5-8 ring tongue terminals) 4m |
| Connection (water piping) | Tetoron Braided hose (O.D.dia.15mm × I.D.dia.9mm) 4m (2 lines) |
Dimension drawing
Feedthrough Collar
Basic composition
| [1] | Sealing flange |
| [2] | Electrode partition |
| [3] | Taeret electrode |
| [4] | Gas introduction |
| [5] | View point |
| [6] | Shutter handle |
| [7] | Shutter |
| [8] | Vent valve |
| [9] | Gauge port |
Sample holder drawing
[The standard type]
[The example of a special type]
※We customize according to the purpose of research and development.
Optional parts
| ●Introduction gas (2,3 lines) | ●DC power supply |
| ●Mass flow controller | ●dia.4 inch, 1way |
| ●Substrate heating 600 degrees C (Water cooling chamber) |
