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Platform
NCH Series
NCH series
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NCH series is vacuum transfer platform that combines robot, core chamber and load lock.
Features
- Connection port can be broadly chosen from 4 (quadrangle) a maximum of 8 (octagon).
- Load lock chamber corresponding to 25 slot wafer cassette is equipped standardly.
- Vacuum pumps and vacuum gauges are options.
Applications
- Automatic wafer transfer for various semiconductor equipments
- Wafer transfer for various vacuum eqipment for R&D
Specifications
| Wafer size | Max 300mm |
| Connection port | 4 to 8 |
| Robot | ELEC (COVOT) |
| Load lock | 25 slot wafer cassette |
| Pump / Vacuum Gauge | Option |
