Hi-Throughput Vacuum Transfer Robot Capable of Handling Multiple Wafers
Vacuum transfer robot
COVOT
Model:COVOT
ULVAC
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It is a clean and versatile vacuum transfer robot that incorporates ULVAC's technology cultivated as a vacuum equipment manufacturer.
Features
- A wide variety of arms are available to suit the stroke, turning radius, number of transfer boards, etc.
- COVOT-CR４ uses a magnetic fluid seals are used for vacuum sealing, and high vacuum up to 10-6Pa can be used.
Specifications
| Model | COVOT-6-X5 | COVOT-CR4 | |
| Working pressure area | atmospheric pressure～10-1Pa | atmospheric pressure～10-6Pa | |
| Wafer Size | 300mm | 300mm | |
| Number of wafers held | 4 piece | 2 piece | |
| Maximum Reach * | 880mm | 1050mm | |
| Rotation angle | 360° endless | ±180° | |
| Lifting stroke | 110mm | 120mm | |
| Minimum Swiveling Diameter * | 980mm | 960mm | |
| Payload capacity (including hands) | 1kg | 1kg | |
| Operating speed Telescopic | Telescopic | Max 1.5sec / Full-stroke | Max 1.5sec / Full-stroke |
| turning | Max 2.0sec / 180° | Max 2.0sec / 180° | |
| Lifting | Max 1.5sec / 20mm | Max 3.5sec / 105mm | |
| Repeatable Position Accuracy | Telescopic | ±0.1mm | ±0.1mm |
| turning | ±0.1mm | ±0.1mm | |
| Lifting | ±0.1mm | ±0.1mm | |
| Teaching Pendant | Accessory | Accessory | |
| controller | Separate | Separate | |
*Depends on mounting arm and hand.
